钕铁硼表面真空蒸镀Al膜的制备及其性能  

Preparation and properties of Al coating on sintered NdFeB magnet surface via vacuum evaporations

作　　者：刘家琴[1] 曹玉杰[1] 张鹏杰[2,3] 张浩[1] 衣晓飞 陈静武 吴玉程[2] LIU Jia-qin CAO Yu-jie ZHANG Peng-jie ZHANG Hao YI Xiao-fei CHEN Jing-wu WU Yu-cheng(Institute of Industry and Equipment Technology, Hefei University of Technology, Hefei 230009, China School of Materials Science and Engineering, Hefei University of Technology, Hefei 230009, China State Key Laboratory of Rare Earth Permanent Magnet Materials, Hefei 231500, China)

机构地区：[1]合肥工业大学工业与装备技术研究院,安徽合肥230009 [2]合肥工业大学材料科学与工程学院,安徽合肥230009 [3]稀土永磁材料国家重点实验室,安徽合肥231500

出　　处：《材料热处理学报》2017年第3期159-166,共8页Transactions of Materials and Heat Treatment

基　　金：国家科技支撑计划项目(2012BAE02B01);安徽省自然科学基金(1408085MKL72;1408085MKL73)

摘　　要：为了提高烧结NdFeB磁体的耐腐蚀性能,采用真空蒸镀的方法在烧结NdFeB磁体表面沉积Al薄膜,并对工艺过程中的工艺参数进行优化。结果表明:真空室温度对Al薄膜的结构及耐腐蚀性能基本没有影响,但温度过高会导致Al薄膜表面岛状结构的增大,造成Al薄膜的厚度一致性难以控制;随着蒸发源温度的增加,Al薄膜的沉积速率逐渐增加,但是随着蒸镀时间的延长,Al薄膜的沉积效率逐渐降低,这是由于Al蒸发原子在基片上冷凝沉积的物理驱动力下降导致的。采用最佳工艺参数制备的厚度为8μm的Al薄膜,耐中性盐雾试验时间可达60 h,且Al镀层的涂覆对NdFeB磁体的磁性能基本没有影响。In order to improve corrosion resistance of sintered NdFeB magnet,an Al coating was prepared on NdFeB substrate by vacuum thermal evaporation method,and the parameters of vacuum deposition process were optimized. The results show that the temperature of vacuum chamber has no effect on structure and corrosion resistance of the Al coating. High temperature will lead to the increase of Al surface island structure in the film,resulting in the difficult control of Al coating thickness. The deposition rate of the Al film increases gradually with the increase of the temperature of the evaporation source. However,further extension of the deposition time,the Al film deposition rate decreases gradually due to the decrease of the physical driving force of Al atoms deposited on the NdFeB substrate. The Al film with a thickness of 8 μm is prepared by the optimum process parameters,and the resistance to neutral salt spray test time is 60 h.Meanwhile,the Al coatings have no deteriorate influence on the magnetic properties of the NdFeB substrates.

关 键 词：烧结钕铁硼 永磁材料 真空蒸镀 Al薄膜 耐腐蚀性能 

分 类 号：TG174.444[金属学及工艺—金属表面处理]