纳米压痕技术研究现状与发展趋势  

Current State and Development Trends of Nano-indentation Technology

作　　者：李言[1] 孔祥健[1] 郭伟超[1] 杨明顺[1] Li Yan Kong Xiangjian Guo Weichao Yang Mingshun(School of Machinery and Precision Instrument Engineering, Xi＇an University of Technology, Xi＇an 710048, China)

机构地区：[1]西安理工大学机械与精密仪器工程学院,西安710048

出　　处：《机械科学与技术》2017年第3期469-474,共6页Mechanical Science and Technology for Aerospace Engineering

基　　金：国家自然科学基金项目(51505377;51475366);陕西留学人员科技活动择优项目(203-253081605);中国博士后科学基金会项目(2016M592821)资助

摘　　要：纳米压痕技术是一种新的材料特性测量方法,被广泛应用在研究微/纳零部件的力学性能和材料微纳区域内的局部特性。介绍了纳米压痕技术的基本理论方法;针对纳米压痕技术的理论建模、压痕形貌、微观组织以及测量精度等几个方面对现有的研究成果进行系统的分析和总结;分析了纳米压痕技术现存的研究难点及主要问题,并对其发展趋势进行了展望。As an advanced measuring technology,nano-indentation technology has been widely used in small volumes,especially for the measurement of material properties at microscopic and smaller scale to identify material parameters. Therefore,it is necessary to systematically and intensively review current achievements. Firstly,the principle of nano-indentation technology is analyzed. Then,the research progress both at domestic and abroad is summarized. Lastly, the research difficulties and the main problems in current research of nano-indentation technology are pointed out. The development trends of nano-indentation technology are proposed.

关 键 词：纳米压痕 研究现状 发展趋势 

分 类 号：TG335.6[金属学及工艺—金属压力加工]