柱式平板声子晶体点缺陷模式研究  

Research on Point Defect Mode of Pillar Plate Phononic Crystal

作　　者：黄翔宇[1,2] 刘永顺[1] 舒风风 武俊峰[1] 吴一辉[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,应用光学国家重点实验室,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《压电与声光》2017年第2期198-201,共4页Piezoelectrics & Acoustooptics

基　　金：“八六三”计划基金资助项目(2015AA042603);国家自然科学基金资助项目(51505456);吉林省科技发展计划基金资助项目(20140101057JC,20150520110JH);吉林省“双十工程”重大科技攻关基金资助项目(201402011GX);吉林省省级经济结构战略调整引导资金专项基金资助项目(2015Y028)

摘　　要：柱式平板声子晶体结构有利于实现质量加载和液相检测,该文提出并制备一种柱式平板声子晶体点缺陷。采用有限元法进行禁带计算分析,仿真出该声子晶体点缺陷模式的振型。采用微机电系统(MEMS)工艺制备出硅基AlN声波传感器,通过电极构型的模式选择对选定点缺陷模式的性能进行了测试分析。结果表明,通过合理设计激励电极可获得较高频率声子晶体点缺陷模式。实验中选择激发的模式频率为7.732 MHz,其对应空气中品质因数Q=700,这为实现液相检测提供了理论基础和实验依据。The pillar plate phononic crystal（PC）structure is benefit for the mass loading and liquid detection.A pillar plate phononic crystal point defect is proposed and fabricated in this paper.The band gap calculation is carried out by using the finite element method and the vibration mode of the point defect mode of the phononic crystal is simulated.An AlN acoustic wave sensor based on silicon is fabricated by MEMS processing.The performance of the selected point defect mode is tested and analyzed through the mode selection of the electrode configuration.The results show that the point defect mode with relative high frequency can be obtained through reasonably designing the electrode.In the experiment,the mode frequency of selective incentive is 7.732 MHz and the corresponding Qvalue is 700 in the air.This provides a theoretical and experimental basis for realizing the liquid phase detection.

关 键 词：声子晶体 柱式平板 点缺陷 选择性激励 工艺加工 

分 类 号：TN4[电子电信—微电子学与固体电子学] O59[理学—应用物理]