复合式MEMS水听器的设计  

The Design of Composite MEMS Hydrophone

作　　者：王雁[1,2] 刘梦然[1,2] 张国军[1,2] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051 [2]中北大学电子测试技术重点实验室,山西太原030051

出　　处：《压电与声光》2017年第2期243-247,共5页Piezoelectrics & Acoustooptics

基　　金：山西省应用基础研究基金资助项目(201601D011035);国家自然科学基金资助项目(61127008);国家重点研发基金资助计划(2016YFC0101900);山西省研究生教育创新基金资助项目(2016BY122)

摘　　要：针对微机电系统(MEMS)仿生矢量水听器工作频带窄,灵敏度低,且存在左、右舷模糊问题,设计了高灵敏宽频带复合式MEMS水听器。矢量部分选择4个不同纤毛长度的仿生矢量水听器组成阵列,各结构间采用并联方式,工作频带拓宽到4 800Hz,并分割出4个不同的频率段,在拓宽了频响带宽的同时保证了灵敏度。标量部分采用低频电容水声传感器进行优化设计,空腔注满硅油、振膜开设声学孔,提高振膜承压性的同时保证了良好的动态性能。后续对标量和矢量信息进行声能流联合算法处理,解决了左右舷模糊的难题。该文主要介绍了复合式MEMS水听器的工作原理,结合ANSYS workbench进行了仿真验证。选用玻璃片及绝缘衬底上的硅(SOI)片键合的单片集成复合结构工艺设计,在玻璃上定义空腔及下电极,在SOI片上定义十字梁和振膜,整体结构一致性好,定位精度高。Aiming at the disadvantages of narrow frequency band,low sensitivity,and ambiguity between the port hand and the starboard existing in micro-electro-mechanical system（MEMS）bionic vector hydrophone,a composite MEMS hydrophone was designed in this paper.An array consisting of 4bionic vector hydrophone with different length of cilia was selected as the vector part,of which the parallel method between the structures was used.The operating frequency was extended to 4 800 Hz,and 4different frequency bands were segmented,while broadened the frequency bandwidth and the sensitivity was ensured at the same time.The scalar part used the low frequency capacitance hydrophone sensor for the design optimization.The cavity was filled with silicone oil and the acoustic holes were opened in the diaphragm,while the pressure capacity of the diaphragm was enhanced and good dynamic performance was ensured at the same time.The scalar and vector information was processed through a joint algorithm of acoustic energy flux,thus the ambiguity between the port hand and the starboard was effectively eliminated.The working principle of composite MEMS hydrophone was introduced in this paper and the simulation verification was carried out through the ANSYS workbench.The cavity and bottom electrode were defined in glass and the four-arm and diaphragm were defined on SOI.The proposed hydrophone has good whole structure consistency and high positioning accuracy.

关 键 词：频带 复合式微机电系统(MEMS)水听器 声能流联合算法 左右舷模糊 ANSYS WORKBENCH 振膜 

分 类 号：TN55[电子电信] TB565.2[交通运输工程—水声工程]