Ag中间层对FePd薄膜结构及磁性能的影响  

Effect of Ag Interlayer on Structure and Magnetic Properties of FePd Thin Films

作　　者：许小宗 成钢[1] 马垒[1] 李林[1] 饶光辉[1] 

机构地区：[1]桂林电子科技大学材料科学与工程学院,广西桂林541004

出　　处：《热加工工艺》2017年第6期123-126,共4页Hot Working Technology

基　　金：国家重点基础研究项目(973项目;2014CB643703);国家自然科学基金资助项目(51261004;51461012);广西高校科研项目(YB2014118)

摘　　要：采用磁控溅射方法在石英玻璃上制备了FePd(93 nm)单层膜和FePd(46.5 nm)/Ag(10 nm)/FePd(46.5 nm)多层膜,并在600℃退火不同时间,通过XRD、VSM对薄膜样品的结构和磁性能进行测量。结果发现:FePd单层膜在600℃退火240 min后有序化转变不明显,300 min后部分有序化,360 min后基本上完全有序化,形成了有序面心四方结构的L1_0-FePd相;当热处理时间为420 min时,有最大的面内矫顽力,约为1670 Oe;Ag中间层对溅射态的FePd薄膜衍射峰的形成有抑制作用,Ag中间层的添加可大幅缩短FePd有序化的时间;样品热处理5 min后就开始有序化,热处理15 min后样品性能即可达到最好,有最大的面内矫顽力2660 Oe,但热处理时间过长会使薄膜磁性能变差。FePd（93 nm）monolayer film and FePd（46.5 nm）/Ag（ 10 nm）/FePd（46.5 nm）multilayer film were deposited on glass by magnetron-controlled sputtering, annealed at 600℃ for different time, using X-ray diffraetometry （XRD） and VSM, the structure and magnetic properties of the films were analyzed. The results show that the ordering transformation of the films is not obvious when annealed at 600℃ for 240 min, parts of the films turns into ordering transformation for 300 min, the films turns ordering transition basically after annealed for 360 min ,then, the L10-FePd phase with ordered surface square structure can be obtained. When the heat treatment time is 420 min, the maximum coercive force in plane is about 1670 Oe. Ag interlayer has inhibitory effect to the formation of diffraction peaks of FePd thin films as sputtered.The addition of Ag interlayer can greatly shorten the ordering time of FePd .The sample after heat treatment for 5 min starts ordered.The sample performance is best as heat treatment for 15 min,and the maximum in-plane coercive is about 2660 Oe, but too long heat treatment time can make the magnetic performance of the films worse.

关 键 词：FePd薄膜 有序化转变 Ag中间层 磁性能 

分 类 号：TG174[金属学及工艺—金属表面处理]