基于CMOS图像传感技术和等倾干涉的改进的二维微位移传感系统  

An improved two-dimensional micro-displacement sensor system based on techniques of CMOS image sensor and equal-inclination interference

作　　者：周国全[1] 周一博[1] 

机构地区：[1]武汉大学物理科学与技术学院,湖北武汉430072

出　　处：《武汉大学学报（工学版）》2017年第2期301-306,共6页Engineering Journal of Wuhan University

基　　金：高校教指委教研项目(编号:JZW-16-DD-15)

摘　　要：结合矩形光学谐振腔的横向等倾干涉原理和F-P干涉技术,设计改进了一种新型的二维微位移光学传感器系统.该系统使用最新的CMOS(Complementary Metal-Oxide-Semiconductor Transistor)图像传感器芯片代替传统的电耦合器件(CCD)实现光电转换,经过1块现场可编程门阵列(FPGA)芯片处理电信号,再将数据传输给计算机以实现实时显示,该位移传感系统的测量精度可达0.1~1μm微米级,在实现功能优化的同时降低了成本,可应用于光学与工业器件的精密加工、大型工程与建筑物的微位移的实时监控.Based on the principle of equal-inclination interference and the technique of complementary met- al-oxide-semiconductor （CMOS） image sensor, an improved two-dimensional （2D） micro-displacement sensor system is designed. Instead of the existing charge coupled device （CCD）, the CMOS image-sensor chips are used in the new sensing system, which can change the photo signals into the electrical signals. Subsequently the electrical signals are processed by a field programmable gate array （FPGA） chip, trans- ferred to a computer system, and finally displayed real-timely on the LabView platform. A high measure- ment sensitivity, up to the level of 0.1-1/μm, can be achieved. This system can be widely applied to many fields, such as monitoring the safety of key water conservancy projects and large buildings, and the real- time control of 2D micro-displacement in precision machining.

关 键 词：光学传感器 等倾干涉 CMOS图像传感器 现场可编程门阵列 二维微位移 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置] TP368.1[自动化与计算机技术—控制科学与工程]