An electrical-coupling-suppressing MEMS gyroscope with feed-forward coupling compensation and scalable fuzzy control  

作　　者：Chunhua HE Jimeng ZHANG Qiancheng ZHAO Qinwen HUANG Zhenchuan YANG Dacheng ZHANG Guizhen YAN 

机构地区：[1]National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Institute of Microelectronics [2]Science and Technology on Reliability Physics and Application of Electronic Component Laboratory,No.5 Electronics Research Institute of the Ministry of Industry and Information Technology

出　　处：《Science China(Information Sciences)》2017年第4期176-186,共11页中国科学（信息科学）（英文版）

基　　金：supported by National Natural Science Foundation of China (Grant Nos. 61434003, 51505089)

摘　　要：This paper proposes a novel electrical coupling suppressing and drive closed loop control method for a MEMS gyroscope with feed-forward coupling compensation（FCC） and scalable fuzzy control. Theoretical analysis of the novel method is described in detail, and it is very simple to realize. Experimental results demonstrate that the electrical anti-resonant peaks located at the amplitude-frequency and phase-frequency responses are both eliminated by FCC control, and the height of the amplitude resonant peak increases more than 24 d B over 1800 Hz span. In addition, the overshoot of the transient response with scalable fuzzy control is smaller than 5%, and the settling time is less than 15 ms. The stabilities of the resonant amplitude and phase of the drive-mode velocity with scalable fuzzy control are about 15 ppm and 11 ppm, respectively. The scale factor of the gyroscope is measured to be 33.98 m V/deg/s with nonlinearity about 0.08%. Furthermore, the bias instability of the gyroscope with wavelet analysis is improved to be about 6.3 deg/h from 25.2 deg/h of the gyroscope without wavelet analysis.This paper proposes a novel electrical coupling suppressing and drive closed loop control method for a MEMS gyroscope with feed-forward coupling compensation（FCC） and scalable fuzzy control. Theoretical analysis of the novel method is described in detail, and it is very simple to realize. Experimental results demonstrate that the electrical anti-resonant peaks located at the amplitude-frequency and phase-frequency responses are both eliminated by FCC control, and the height of the amplitude resonant peak increases more than 24 d B over 1800 Hz span. In addition, the overshoot of the transient response with scalable fuzzy control is smaller than 5%, and the settling time is less than 15 ms. The stabilities of the resonant amplitude and phase of the drive-mode velocity with scalable fuzzy control are about 15 ppm and 11 ppm, respectively. The scale factor of the gyroscope is measured to be 33.98 m V/deg/s with nonlinearity about 0.08%. Furthermore, the bias instability of the gyroscope with wavelet analysis is improved to be about 6.3 deg/h from 25.2 deg/h of the gyroscope without wavelet analysis.

关 键 词：MEMS gyroscope electrical coupling suppressing ANTI-RESONANCE feed-forward coupling compensation scalable fuzzy control 

分 类 号：TN96[电子电信—信号与信息处理]