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机构地区:[1]中国船舶重工集团公司第七二五研究所,河南洛阳471023
出 处:《装备制造技术》2017年第2期147-150,共4页Equipment Manufacturing Technology
摘 要:原子力显微镜(AFM)在扫描图像过程中会产生赝像的重要因素是:在探针和基底表面接触过程中,两者之间会生成一种带有黏附力的结构,称之为液桥。在大气环境下,不同的湿度条件能够影响液桥的形成和断裂,而液桥的存在会使得原子力显微镜在扫描成像过程中,悬臂梁自由端的受力和能量产生变化,最终干扰扫描成像的质量。研究不同湿度对于针尖和基底之间的毛细力F_(max)、能量耗散η的影响,选择最佳的成像条件,可以提高AFM工作的准确性和可靠性。Atomic force microscope (AFM)would bring artifacts while scaning as there is a liquid bridge between the tip and sample during the tip approaching the surface. There is strong capillary force in the liquid bridge. In ambient air the formation and rupture of the liquid bridge is effected by the humidity.Although high precision of AFM imaging, the existence of the liquid bridge will effect the capillary force and dissipation while scanning. Then the quality of the image will also be effected. In order to improve the veracity and the reliability of the AFM and to choose the best operation condition, the research on the effect of the different humidity to the capillary force and the dissipation between the tip and the sample is necessary.
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