基于阈值优化迟滞模型的压电微定位平台前馈控制  

Feedforward control of a piezoelectric micro-positioning stage based on threshold-optimization hysteresis model

作　　者：宋林[1] 崔玉国[1] 万光继 赵余杰 刘尔春 方凡[1] 

机构地区：[1]宁波大学机械工程与力学学院,浙江宁波315211

出　　处：《宁波大学学报（理工版）》2017年第2期39-43,共5页Journal of Ningbo University：Natural Science and Engineering Edition

基　　金：浙江省高等学校中青年学科带头人学术攀登项目(pd2013091)

摘　　要：为减小压电微定位平台的迟滞误差,设计前馈控制器对其进行控制.首先,在所建平台迟滞模型精度达到要求并使各阈值点精度相同的情况下,对平台迟滞模型的阈值进行优化,得到满足模型精度要求的最小算子数,进而建立平台的PI(Prandtl-Ishilinskii)迟滞模型.接着,通过对所建迟滞模型求逆,设计出平台的前馈控制器.最后,在所设计的前馈控制作用下,平台达到5μm理想阶跃值的响应时间为0.01 s,稳态误差中线的变化范围为0.40~0.50μm;当期望平台输出最大值为17μm的变幅值三角波位移时,实测位移相对于理想位移的误差中线变动范围为-1.15^-0.05μm,所设计前馈控制器可有效减小压电微定位平台的迟滞误差.In order to reduce the hysteresis error of the piezoelectric micro-positioning stage, the feedforward controller is designed. Firstly, the threshold of the hysteresis model of the stage is optimized and the minimum number of operators satisfying the model accuracy is obtained, so as to make the established hysteresis model meet the requirements of precision and the accuracy remains the same at each threshold point. Secondly, a PI（Prandtl-Ishilinskii） hysteresis model of the stage is established. Lastly, the feedforward controller of the stage is designed by the inverse calculation of the hysteresis model. Thus, under the feedforward control, the response time of the stage is 0.01 s at an ideal step of 5 μm, and the variation range of the central line of steady state error is 0.40~0.50 μm. Furthermore, when the desired output of the stage is the triangular wave with maximum displacement amplitude of 17 μm, the variation range of the measured displacement is-1.15^-0.05 μm comparing with the error central line of the ideal displacement. The designed feedforward controller can reduce the hysteresis error of piezoelectric micro-positioning stage effectively.

关 键 词：压电微定位平台 迟滞建模 阈值优化 前馈控制 

分 类 号：TN304.9[电子电信—物理电子学]