高Q平面集成光波导谐振腔  

A High Q Planar Integrated Optical Waveguide Resonator

作　　者：钱坤[1] 唐军[1] 刘俊[1] 张成飞[1] 郭慧婷[1] 潘梓文 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《微纳电子技术》2017年第5期319-323,共5页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(51225504;61571406;51635011)

摘　　要：提出了一种高品质因数的氧化硅平面集成光波导谐振腔的设计与加工方案。利用Matlab与BeamPROP软件对回音壁模式(WGM)谐振腔结构模型进行了仿真分析,深入讨论了耦合状态、腔长与谐振腔品质因数的关系。设计了直径6 cm的环形光波导谐振腔,直波导与环形腔的耦合率为3.3%。整个谐振腔耦合结构被设计为欠耦合状态来优化其品质因数。在此基础上,在硅衬底上采用等离子体增强化学气相沉积(PECVD)技术和紫外光刻技术制作出二氧化硅光波导谐振腔芯片,芯片尺寸为7 cm×7 cm。利用一个波长为1 550 nm可调谐激光器对谐振腔的光谱进行了测试,测试结果表明所加工出的氧化硅光波导谐振腔的品质因数高达4.3×107。A design and processing scheme of the silica planar integrated optical waveguide resonator with high quality factor was presented.The structure model of the whispering gallery mode（WGM）resonator was simulated and analyzed by the Matlab and BeamPROP softwares.The relationships between the coupling state,cavity length and quality factor of the resonator were further discussed.The ring optical waveguide resonator with the diameter of 6 cm was designed.The coupling efficiency between the straight waveguide and ring cavity is 3.3%.The resonator coupling structure was designed in under-coupling state to optimize the quality factor.And on this basis,using the plasma enhanced chemical vapor deposition（PECVD）technology and UV lithography technology,the silica optical waveguide resonator chip with the size of 7 cm×7 cm was fabricated on the silicon substrate.The spectrum of the resonator was tested by a tunable laser with the wavelength of 1 550 nm.The test results show that the quality factor of the fabricated silica optical waveguide resonator is up to 4.3×10^7.

关 键 词：回音壁模式(WGM) 谐振腔 硅基二氧化硅 品质因数 光波导 

分 类 号：TN256[电子电信—物理电子学]