单排差动结构的新型纳米时栅位移传感器  

Novel nanometer time-grating displacement sensor with single row differential structure

作　　者：彭凯[1] 于治成[2] 刘小康[3] 郑方燕[3] 蒲红吉[4] 

机构地区：[1]重庆大学机械传动国家重点实验室,重庆400044 [2]合肥工业大学仪器科学与光电工程学院,合肥230009 [3]重庆理工大学机械检测技术与装备教育部工程研究中心,重庆400054 [4]西安交通大学机械制造系统工程国家重点实验室,西安710049

出　　处：《仪器仪表学报》2017年第3期734-740,共7页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(51435002);教育部新世纪优秀人才支持计划(NCET-13-1065);重庆高校创新团队(CXTDX201601029)项目资助

摘　　要：在双排结构纳米时栅位移传感器的研究基础上,提出了一种单排差动结构的新型纳米时栅位移传感器。通过直接构造一个匀速运动的交变电场来产生行波信号,解决了双排结构所具有的串扰问题和安装问题;采用差动感应极片来拾取信号,可有效地消除共模干扰。用微纳加工工艺制作了一种多层薄膜的单排差动结构的纳米时栅传感器样机并进行了性能测试,最终在200 mm的量程范围内取得了±150 nm的测量精度。对比双排结构的纳米时栅传感器,这种新型的纳米时栅传感器测量精度、信号稳定性及抗干扰能力得到明显的提高,并且在尺寸减小的同时拓展了有效量程,因此在产品化的过程中更具有应用前景。Based on the nanometer time-grating displacement sensor with double row structure, a novel nanometer time-grating displacement sensor with single row differential structure is proposed in this paper. An alternating electric field with stable motion is constructed to generate a travelling wave signal to overcome the cross interference and installation existing in the double row structure.Differential induction electrodes are employed to pick up the signals,which can effectively eliminate the common mode interference.Micro-nano fabrication technology is adopted to fabricate a prototype sensor with single row differential structure based on multilayer thin films,and the performance of the prototype sensor is evaluated. The experimental results indicate that the prototype sensor achieves a value of ± 150 nm measurement accuracy within 200 mm measuring range. Comparing with the double row nanometer time-grating sensor,the measurement accuracy,signal stability and anti-interference ability of this sensor are greatly improved. In addition,the size of the sensor is reduced while the effective measuring range is extended. Therefore,the novel nanometer time-grating sensor has more application prospects in the process of commercialization.

关 键 词：纳米时栅 电容式位移传感器 单排结构 差动感应极片 

分 类 号：TH7[机械工程—仪器科学与技术]