CVD技术制备Ta/W层状复合材料  

Preparation of Ta/W Composite by CVD

作　　者：祁小红[1] 郑旭[1] 蔡宏中[1] 刘少鹏[1] 胡昌义[1] 魏燕[1] 

机构地区：[1]昆明贵金属研究所稀贵金属综合利用新技术国家重点实验室,昆明650106

出　　处：《航空材料学报》2017年第2期38-43,共6页Journal of Aeronautical Materials

基　　金：国家自然科学基金(51361015);国家自然科学青年科学基金(51201076);云南省应用基础研究重点项目(2016FA053);稀贵金属综合利用新技术国家重点实验室开放课题(SKL-SPM-201524)

摘　　要：运用化学气相沉积(Chemical Vapor Deposition,CVD)技术制备了W体积分数分别10%,13%和18%的Ta/W两层层状复合材料,采用金相显微镜(OM)、扫描电镜(SEM)和室温拉伸实验对复合材料的性能进行分析。结果表明:运用CVD技术可以制备W体积分数不同,且密度优于理论密度99.4%的层状复合材料;复合材料中Ta,W层的晶粒均为柱状晶粒,离界面越近,晶粒越细;沉积态复合材料的力学性能优于纯CVD Ta和CVD W;1600℃×2 h的热处理后,复合材料的界面扩散层宽度显著增大,力学性能高于沉积态的力学性能,最高抗拉强度可达660 MPa。The Ta/W composites with 10% W, 13% W and 18% W were prepared by chemical vapor deposition （CVD）. The properties of Ta/W composites were investigated by optical microscopy （OM） , scanning electron microscopy （ SEM ） and tensile test. The results show that it is possible to prepare Ta/W composites with different W volume fractions by CVD, and the actual densities of the composites are more than 99.4% of the theoretical density. Both Ta and W layers have columnar grain structures, and the more close to the interface, the more fine the grains are. The mechanical properties of CVD Ta/W are better than those of CVD Ta or CVD W. Af-ter hot treatment（ 1600 °C ×2 h） ,the diffused layers of the composites have become more wider and the mechanical properties are in-creased remarkably, and the tensile strength of the CVD Ta/W composite with 18% W is 660 MPa.

关 键 词：化学气相沉积(CVD) Ta/W层状复合材料 W体积分数 力学性能 

分 类 号：TG146.416[一般工业技术—材料科学与工程]