基于多弧离子镀的靶材成分对膜层的影响  

Effect of Target Composition on the Film Based on Multi-arc Ion Plating

作　　者：张会霞[1] 于鹏鹏 王杰[1] 王梦蓉[1] 朱红玲[1] 陈冲[1] 卢龙[1] 

机构地区：[1]淮海工学院机械工程学院,江苏连云港222005

出　　处：《淮海工学院学报（自然科学版）》2017年第1期5-7,共3页Journal of Huaihai Institute of Technology:Natural Sciences Edition

基　　金：淮海工学院自然科学基金项目(Z2014002)

摘　　要：采用多弧离子镀技术,探究靶材成分对膜层性能的影响,从而得到最佳的靶材成分.在同种工艺条件下,得到不同靶材成分时膜层的形貌与性能,分析靶材成分对膜层形貌、膜基结合力及显微硬度的影响.实验结果表明,由于膜层中Ti和Al元素含量的不同,膜层的性能都会发生相应改变,一般是随着Al含量的增加先升高后降低.With the technology of multi-arc ion plating, the effect of target composition on the film properties is investigated in order to get the best target composition. In the same conditions, morphology and properties of the coating willbe different while using different target composi-tions. Influence of target composition on the morphology of the coating, bonding strength and micro hardness will be analyzed. The results show that as the content of Ti and A1 in the film is different, the performance of the film will change accordingly, which usually increases and then decreases with the increase of A1 content.

关 键 词：多弧离子镀 靶材成分 膜层性能 

分 类 号：TG174[金属学及工艺—金属表面处理]