基于鼓包法的PbZr_(0.52)Ti_(0.48)O_3/Ni薄膜材料力电磁耦合特性测试分析  

Testing and Analysis of Mechanical-Electrical-Magnetic Coupling Characteristics of PbZr_(0.52)Ti_(0.48)O_3/Ni Thin Film Based on Bulge Test Method

作　　者：刘奇[1,2] 孙长振 何元东[1,2] 徐浩[3] 于泽军[3] 毛卫国[1,2] 裴永茂[3] 方岱宁[3] 

机构地区：[1]湘潭大学材料科学与工程学院,湘潭411105 [2]薄膜材料与器件湖南省重点实验室,湘潭411105 [3]北京大学工学院,北京100086

出　　处：《现代应用物理》2017年第1期67-75,共9页Modern Applied Physics

基　　金：国家自然科学基金资助面上项目(11272276);湖南省自然科学基金杰出青年基金资助项目(14JJ1020)

摘　　要：通过溶胶-凝胶法、离子束磁控溅射法和化学腐蚀法分别制备了PZT薄膜、PbZr_(0.52)Ti_(0.48)O_3/Ni(PZT/Ni)复合薄膜材料的鼓包样品。采用X射线衍射仪(X-ray diffraction,XRD)表征了PZT/Ni复合薄膜材料的物相结构;利用自主研制的多功能新型鼓包测试平台,在力场、电场、磁场作用下分别测试分析了PZT/Ni复合薄膜材料体系的力电磁耦合性能。结果表明:随着电场强度的增加,PZT薄膜的弹性模量E先增大后减小;PZT/Ni复合薄膜在电场作用下实现了电磁调控,矫顽磁场强度Hc提高了33.4%;随着测试平台油压的增大,PZT薄膜的剩余极化强度和矫顽场分别增加了17.1%和32.1%,PZT/Ni复合薄膜的矫顽磁场强度提高了46.1%。PZT and PZT/Ni thin film materials were prepared by sol-gel method, ion beam magnetron sputtering method, and chemical etching method. Mechanical-electrical-magnetic properties of PZT/Ni film were measured by self-developed bugle test system. The structure of PZT/Ni film was examined by XRD. It was found that the elastic modulus of PZT film firstly increased and then gradually decreased with the increasing of applied electric field. The corresponding magnetic coercive field increased of 33.4%. With the increase of the oil pressure, the residual polarization and coercive field of PZT thin films increased of 17. 1 % and 32.1%, respectively. The magnetic coercivity field of PZT/Ni composite films increased of 46.1%.

关 键 词：PZT/Ni 鼓包法 多场耦合 弹性模量 矫顽场 

分 类 号：O484[理学—固体物理]