Recent advances in micro- and nano-machining technologies  

作　　者：Shang GAO Han HUANG 

机构地区：[1]School of Mechanical and Mining Engineering, The University ofQueensland, QLD 4072, Australia Key Laboratory for Precision andNon-traditional Machining Technology of Ministry of Education, DalianUniversity of Technology, Dalian 116024, China [2]School of Mechanical and Mining Engineering, The University ofQueensland, QLD 4072, Australia

出　　处：《Frontiers of Mechanical Engineering》2017年第1期18-32,共15页机械工程前沿（英文版）

摘　　要：Device miniaturization is an emerging advanced technology in the 21 st century. The miniaturiza- tion of devices in different fields requires production of micro- and nano-scale components. The features of these components range from the sub-micron to a few hundred microns with high tolerance to many engineering materi- als. These fields mainly include optics, electronics, medicine, bio-technology, communications, and avionics. This paper reviewed the recent advances in micro- and nano-machining technologies, including micro-cutting, micro-electrical-discharge machining, laser micro-machin- ing, and focused ion beam machining. The four machining technologies were also compared in terms of machining efficiency, workpiece materials being machined, minimum feature size, maximum aspect ratio, and surface finish.Device miniaturization is an emerging advanced technology in the 21 st century. The miniaturiza- tion of devices in different fields requires production of micro- and nano-scale components. The features of these components range from the sub-micron to a few hundred microns with high tolerance to many engineering materi- als. These fields mainly include optics, electronics, medicine, bio-technology, communications, and avionics. This paper reviewed the recent advances in micro- and nano-machining technologies, including micro-cutting, micro-electrical-discharge machining, laser micro-machin- ing, and focused ion beam machining. The four machining technologies were also compared in terms of machining efficiency, workpiece materials being machined, minimum feature size, maximum aspect ratio, and surface finish.

关 键 词：micro machining CUTTING electro dischargemachining （EDM） laser machining focused ion beam（FIB） 

分 类 号：TG661[金属学及工艺—金属切削加工及机床] TB383[一般工业技术—材料科学与工程]