Safe growth of graphene from non-flammable gas mixtures via chemical vapor deposition  

作　　者：Ying Feng Daniel J.Trainer Hongshang Peng Ye Liu Ke Chen 

机构地区：[1]Department of Physics, Temple University, Philadelphia, Pennsylvania 19122, USA [2]Department of Electrical and Computer Engineering, Temple University, Philadelphia, Pennsylvania 19122, USA [3]College of Science, Minzu University of China, Beijing 100044, China [4]Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China

出　　处：《Journal of Materials Science & Technology》2017年第3期285-290,共6页材料科学技术（英文版）

摘　　要：Chemical vapor deposition has emerged as the most promising technique for the growth of graphene.However, most reports of this technique use either flammable or explosive gases, which bring safety concerns and extra costs to manage risk factors. In this article, we demonstrate that continuous monolayer graphene can be synthesized via chemical vapor deposition technique on Cu foils using industrially safe gas mixtures. Important factors, including the appropriate ratio of hydrogen flow and carbon precursor,pressure, and growth time are considered to obtain graphene films. Optical measurements and electrical transport measurements indicate graphene films are with comparable quality to other reports. Such continuous large area graphene can be synthesized under non-flammable and non-explosive conditions, which opens a safe and economical method for mass production of graphene. It is thereby beneficial for integration of graphene into semiconductor electronics.Chemical vapor deposition has emerged as the most promising technique for the growth of graphene.However, most reports of this technique use either flammable or explosive gases, which bring safety concerns and extra costs to manage risk factors. In this article, we demonstrate that continuous monolayer graphene can be synthesized via chemical vapor deposition technique on Cu foils using industrially safe gas mixtures. Important factors, including the appropriate ratio of hydrogen flow and carbon precursor,pressure, and growth time are considered to obtain graphene films. Optical measurements and electrical transport measurements indicate graphene films are with comparable quality to other reports. Such continuous large area graphene can be synthesized under non-flammable and non-explosive conditions, which opens a safe and economical method for mass production of graphene. It is thereby beneficial for integration of graphene into semiconductor electronics.

关 键 词：Graphene Safe growth Non-flammable Chemical vapor deposition（CVD） Contact resistance Transfer length method 

分 类 号：TQ127.11[化学工程—无机化工]