飞秒激光成丝制备毫米级深孔  

Fabrication of Millimeter-Scaled Holes by Femtosecond Laser Filamentation

作　　者：张艳杰[1] 宋海英[1] 刘海云[1] 刘勋[2] 李维[2] 刘世炳[1] 

机构地区：[1]北京工业大学激光工程研究院强场与超快光子学实验室,北京100124 [2]中国空间技术研究院北京空间机电研究所,北京100094

出　　处：《中国激光》2017年第4期119-128,共10页Chinese Journal of Lasers

基　　金：国家自然科学基金(51275012);中国空间技术研究院创新基金项目

摘　　要：利用飞秒激光成丝效应对2mm厚的聚甲基丙烯酸甲酯材料在空气环境下进行打孔实验,总结光丝长度随飞秒激光平均功率的变化,利用扫描电子显微镜初步分析深微孔的表面形貌并测量孔径的大小,然后分析孔径、深宽比以及锥度随激光平均功率和加工时间的变化规律。研究结果表明,随着飞秒激光平均功率的增大,孔径大小和锥度均有着明显的增大趋势,且深宽比下降。随着加工时间的增加,孔径变大,深宽比下降,锥度先增大后减小再增大,但总体上呈现增大趋势。By using femtosecond laser filamentation, the drilling of micro-holes in 2 ram thick polymethyl methacrylate materials in the air environment is carried out. During the experiments, the variations of the femtosecond laser filament length with average femtosecond laser power are summarized. The surface morphology and the diameter of the micro-holes are measured by scanning electron microscopy. The hole dimensions, the aspect ratio （depth to diameter） and the taper as a function of laser average power and processing time are analyzed. The results show that with the increase of the average laser power, the diameter and the taper of the holes increase obviously, while the aspect ratio decreases. With the increase of the processing time, the diameter of the holes increases, the aspect ratio decreases, and the taper of the holes increases first and then decreases and then increases, however it keeps an increasing trend in overall.

关 键 词：激光技术 飞秒激光成丝效应 深孔锥度 孔径 深宽比 

分 类 号：O436[机械工程—光学工程]