双螺杆真空泵齿顶圆周间隙泄漏模拟计算  

Simulation of circumferential clearance leakage inside the twin screw vacuum pump

作　　者：施毅[1] 谭昱全 董中林 李琦[1] 杨炼 倪小洪 干蜀毅[1] 

机构地区：[1]合肥工业大学真空科技与装备研究所,安徽合肥230009 [2]杭州华达喷射真空设备有限公司,浙江杭州311113

出　　处：《真空》2017年第2期6-9,共4页Vacuum

摘　　要：在研究螺杆泵各项间隙构成原理的基础上,通过CFX软件对同一级齿顶圆周间隙模型进行模拟计算,分析了流体温度、间隙高度、泄露通道宽度对泄漏量的影响。研究结果表明:流体温度对通过泄漏通道的质量流量影响显著,且排气级气体温度不宜过低;螺杆泵稳定运行时的最大齿顶圆周间隙高度应有一定的限制;在相同条件下泄漏量随泄露通道宽度增加而减小。计算结果对双螺杆真空泵腔内间隙的设计计算和优化提供了模拟计算方法和理论基础,对提高双螺杆真空泵的抽气性能有着积极的意义。Based on study of the clearance of screw pump clearance,the simulation calculations of the circumferential clearance model were carried by CFX. The influence of fluid temperature, clearance height and leakage channel width on leakage was analyzed. The results show that the gas temperature has significant influence on the mass flow through the leakage path and the exhaust gas temperature should not be too low; The maximum clearance height should be limited to some extent; Under the same conditions, the leakage rate decreases with the increase of the leakage channel width. This work provides a calculation method and theoretical basis for design and optimization of clearances inside twin screw vacuum pump, which has positive significance in improving pump performance.

关 键 词：螺杆真空泵 齿顶圆周间隙 泄漏 CFX 

分 类 号：TB752.2[一般工业技术—真空技术]