中红外硅微透镜阵列的离焦效应（英文）  

Focal shift of silicon microlens array in mid-infrared regime

作　　者：左海杰 杨文[1] 张江勇[1] 应磊莹[1] 张保平[1] 侯治锦 陈洪许 司俊杰 

机构地区：[1]厦门大学电子工程系微纳光电子研究室,福建厦门361005 [2]洛阳光电技术研究中心,河南洛阳471009

出　　处：《红外与毫米波学报》2017年第2期149-153,共5页Journal of Infrared and Millimeter Waves

基　　金：Supported by Special Project on the Integration of Industry,Education and Research of Aviation Industry Corporation of China(CXY2011XD24)

摘　　要：采用严格数值算法对中红外硅微透镜阵列进行了模拟,该微透镜阵列特征尺寸小于波长工作波长.研究发现该微透镜阵列存在一个显著的离焦效应,其离焦量达到0.4左右,超出了现有的传统理论模型预测范围.对微透镜阵列进行了制作和焦距测试,发现测试结果跟数值模拟基本吻合.微纳衍射光学集成系统中透镜离焦量是系统集成非常重要的一个参数,该研究结果为硅微透镜阵列和中红外探测器光学集成提供有效参考.In this study rigorous numerical model was utilized to characterize the focal shift of the diffractive mid- infrared （MIR） silicon microlens arrays （MLAs） with the critical size smaller than the working wavelength. We found a more pronounced focal shift in mid-infrared wavelength which is out of the range predicted by existing models. Focal properties of the MLAs were also measured experimentally. The results agrees well with the simulation results. Our results provide a reference point in understanding the focal shift in MIR regime, which is impor- tant in terms of deciding the focal length of micro-nano lens systems, especially when dealing with the integration of diffractive devices in infrared optical system.

关 键 词：亚波长结构 FDTD 红外探测器 离焦 微透镜阵列 

分 类 号：TN214[电子电信—物理电子学]