小型真空室真空测量与控制系统的设计与实现  

Design and Implementation of Vacuum Measurement and Control System for Small Vacuum Chamber

作　　者：麻硕[1] 邱忠义[1] 陈卓哲 

机构地区：[1]北京金自天正智能控制股份有限公司轧钢传动事业部,北京100070

出　　处：《自动化与仪表》2017年第4期59-62,共4页Automation & Instrumentation

基　　金：国家重大科学仪器设备开发专项项目(2012YQ050076)

摘　　要：针对小型真空室在生产、制造和检测中的应用现状,该文提出并设计了一种适用于中高真空度、带变频控制的小型真空室真空测量与控制系统,并对其进行了试验验证。该系统具有实时采集和上传真空室压力值以及变频器频率值、在线调节真空泵的转速以及单步调试的功能。试验采用计算机模拟上位机,通过基于Lab VIEW构建的监控平台,监测系统的工作状态,并对系统进行控制。试验结果表明,该控制系统各个部件运转正常,对真空室压力值和变频器频率值测量准确,能够在线调节变频器的频率值,在实现真空度控制的同时达到节约能源的效果,并且该控制系统的单步调试功能可以进行故障排查,为整机调试和检修带来方便。Small vacuum chamber is usually used in production,manufacture and detection. Based on the application statues,this paper proposed and designed a vacuum measure and control system with frequency conversion control,which is used for small vacuum chamber. This system is suitable for medium and high vacuum,and validated by experiment. It has real-time collection and upload the value of pressure and frequency,regulates the vacuum pump speed on line,and debugs by single step. In the experiment,the computer is used to simulate the host computer,and the monitoring platform is built based on Lab VIEW. This platform monitors the working statues and controls the system. The experiment results show that each part of the system works well,the pressure and frequency are measured accurately,and the frequency converter can be controlled online. It can control the vacuum and save the energy. This system also has the function of single step debugging which can be used for troubleshooting and convenience to complete machine debug and recondition.

关 键 词：真空测量与控制 小型真空室 变频控制 单步调试 

分 类 号：TB75[一般工业技术—真空技术]