基于光纤法布里——珀罗干涉仪的温度传感器  

Temperature sensor based on optical fiber Fabry-Pérot interferometer

作　　者：段丹阳 程进[1] 高然[1] 逯丹凤[1] 祁志美[1] DUAN Dan-yang CHENG Jin GAO Ran LU Dan-feng QI Zhi-mei(State Key Laboratory of Transducer Technology,Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China)

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室,北京100190

出　　处：《传感器与微系统》2017年第4期124-127,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(61377064;61401432;61501425);中国博士后科学基金资助项目(2015M571118)

摘　　要：提出了一种基于光纤法布里—珀罗(F-P)干涉仪的温度传感器,传感器的敏感部分是一段两端研磨为平面的单模光纤,它的一端与一根单模传光光纤相接以形成一个反射面,另一端与空气接触形成另一个反射面,这两个反射面与敏感部分光纤形成本征光纤F-P干涉仪(IFPI)。分析了该光纤温度传感器的温度响应特性,制作了传感器原理样机,搭建了测试平台,并对原理样机进行了测试。在25~30℃的范围内对传感器进行了标定,测得温度响应灵敏度为21.504·2πrad/℃,温度分辨率为0.046℃。实验结果表明:该传感器对温度有较好的线性响应和较高的灵敏度,且制作工艺简单,成本低,具有良好的应用前景。A temperature sensor based on optical fiber Fabry-Pérot（ F-P） interferometer is proposed. The sensitive part of the sensor is a single mode fiber with both ends are grinded to plane. One end of the sensitive fiber is connected with another single mode fiber to form a reflective surface. The other end of the sensitive fiber is exposed to air to form another reflective surface. The two reflective surfaces and the sensitive optical fiber constitute an intrinsic optical fiber F-P interferometer（ IFPI）. Temperature response characteristics of the optical fiber temperature sensor is analyzed,optical fiber temperature sensor principle prototype is manufactured and test platform is built up,test on prototype is performed. The temperature sensor is calibrated at temperature range of 25- 30 ℃. The temperature sensitivity is 21. 504·2π rad/℃ and temperature resolution is 0. 046 ℃. Experimental results demonstrate that this sensor has good linear response to temperature and high sensitivity. This kind of sensor has a good application prospect because of its simple fabrication process and low cost.

关 键 词：光纤温度传感器 本征法布里-珀罗干涉仪 单模光纤 温度响应 

分 类 号：TP29[自动化与计算机技术—检测技术与自动化装置]