Theoretical study of micro-optical structure fabrication based on sample rotation and two-laser-beam interference  

作　　者：陈宜臻 王向贤 王茹 杨华 祁云平 

机构地区：[1]School of Science, Lanzhou University of Technology [2]College of Physics and Electronic Engineering, Northwest Normal University

出　　处：《Chinese Physics B》2017年第5期148-152,共5页中国物理B（英文版）

基　　金：Project supported by the National Natural Science Foundation of China(Grant No.61505074);the National Basic Research Program of China(Grant No.2013CBA01703);the Hong Liu Young Teachers Training Program Funded Projects of Lanzhou University of Technology,China(Grant No.Q201509);the National Undergraduate Innovation Training Program of China(Grant No.201610731030)

摘　　要：A method for fabricating a micro-optical structure based on sample rotation and two-laser-beam interference is proposed. The rotation process is analyzed using the coordinate transformation in matrix presentation and the theoretical expressions of the optical field distributions corresponding to different sample rotations. By rotating the samples and changing the laser wavelength, various special micro-optical structures can be obtained, such as equally spaced concentric rings and irregular trapezoidal lattices; these structures are demonstrated by simulating the corresponding optical field distributions. The proposed approach may be developed into a low-cost laser interference lithography technology for the fabrication of various micro-optical structures.A method for fabricating a micro-optical structure based on sample rotation and two-laser-beam interference is proposed. The rotation process is analyzed using the coordinate transformation in matrix presentation and the theoretical expressions of the optical field distributions corresponding to different sample rotations. By rotating the samples and changing the laser wavelength, various special micro-optical structures can be obtained, such as equally spaced concentric rings and irregular trapezoidal lattices; these structures are demonstrated by simulating the corresponding optical field distributions. The proposed approach may be developed into a low-cost laser interference lithography technology for the fabrication of various micro-optical structures.

关 键 词：rotation fabrication lithography fabricating rotating coordinate presentation hexagonal coherent grating 

分 类 号：TN24[电子电信—物理电子学] TN305.7