带能谱分析的扫描电子显微镜对材料中微量物分析的应用  

Identification of A Trace phaes in material by the SEM with EDX

作　　者：夏江南[1] 高建辉[1] 姜宁[1] 韩明星[1] 

机构地区：[1]中国乐凯集团有限公司,河北保定071054

出　　处：《信息记录材料》2017年第3期1-3,共3页Information Recording Materials

摘　　要：近年来,随着材料学科的发展,配备可检测x射线能谱仪的扫描电子显微镜(SEM/EDS)越来越引起重视。此方法较为简便,可对样品的表面形貌以及微区成分进行快速的定性和定量分析。本文介绍了扫描电子显微镜和可检测x射线能谱仪的工作原理以及特点。以微量物为实例,进行多次定点分析、线分析以及面分析,说明在对微量物的分析中EDS/SEM法是最有效的方法之一。Recently, with the fasten development of material science, the SEM（scanning electron microscope） and with X-ray EDX （energy dispersive microanalysis） has attracted the attention of the scientific community. This method is more simple can be used for the qualitative and quantitative analysis of sample structure and microanalysis. The principles and characters of SEM with EDS are analyzed briefly in the paper, Using trace substances as materials, through several. experiments we obtained the analysis of SEM/EDS on element analysis of special point, line and surface scanning. The results showed that the trace analysis of SEM/EDS is one of the most effective way.

关 键 词：扫描电手显微镜 能谱仪 分析 

分 类 号：TG115.221[金属学及工艺—物理冶金]