TiO_2-Al含能复合薄膜激光烧蚀特性研究  

Laser Ablation Characteristics of TiO_2-Al Energetic Multilayer Films

作　　者：马志朋[1] 施群荣[2] 迟强[3] 吴立志[1] 吴修伟 张伟[1] 沈瑞琪[1] 叶迎华[1] 

机构地区：[1]南京理工大学化工学院,江苏南京210094 [2]南京理工大学科学技术研究院,江苏南京210094 [3]南京理工大学国有资产与实验室管理处,江苏南京210094

出　　处：《爆破器材》2017年第3期6-11,共6页Explosive Materials

基　　金：国家自然科学基金项目(11202105);国家自然科学基金项目(11672137)

摘　　要：利用真空磁控溅射技术制备了不同调制周期的TiO_2-Al复合薄膜和TiO_2-Al-Al_2O_3-Al复合飞片,通过SEM对各层薄膜的厚度、界面成分、薄膜均匀性和致密性进行相应表征;利用光子多普勒测速系统(PDV)测量飞片速度,得出飞片速度与激光脉冲能量的关系;运用原子发射光谱法研究了TiO_2-Al复合薄膜调制周期对激光诱导TiO_2-Al复合薄膜等离子体特性的影响。研究结果表明:复合薄膜不同材料膜层分界面清晰可见,具有明显的层状结构;飞片速度随激光能量的增加先上升后降低,调制周期小的飞片速度高于调制周期大的飞片;对应的等离子体电子温度规律类似;在一定能量范围内,反应性复合薄膜在激光辐照下对飞片的速度特性有较为显著的增强作用。该结果对提高激光驱动飞片能量耦合率有重要意义。Magnetron sputtering was used to make Ti02-Al energetic multilayer films and Ti02-Al-Al203-Al flyers with different modulation periods. Each layer of the films was characterized by SEM in view of its thickness, interfacial composition,uniformity and densification. Velocity of flyer was measured by PDV to obtain its relationship to the energy of laser pulse. Effects of modulation periodon plasmatic characteristics of laser-induced Ti02-Al composite films were studied by atomic emission spectroscopy. Results show that the surface of the films is smooth and the interfaces between different layers are compact. Velocity of flyer increases first and then decreases with the increase of laser energy, and the velocity of flyer with small modulation period is higher than that of flyer with large modulation period. The corresponding electron tem-perature in laser plasma follows the same law. As one of promising ablative layer materials products, energetic multilayer films could significantly improve the velocity of flyers within certain energy range. This research has an important signifi-cance on promoting laser driven energy coupling rate.

关 键 词：激光烧蚀 反应性复合薄膜 电子温度 飞片速度 

分 类 号：O539[理学—等离子体物理]