POM匀胶托盘的优化设计  

Optimal Design of POM Spin Coating Pallets

作　　者：魏存露 花国然[1] 王强[2] 

机构地区：[1]南通大学机械工程学院,江苏南通226019 [2]南通大学电子信息学院,江苏南通226019

出　　处：《工程塑料应用》2016年第12期58-62,共5页Engineering Plastics Application

基　　金：江苏省科技成果转化专项资金(BA2013099);南通市重大科技创新专项项目(XA2013001);江苏省研究生培养创新工程项目(KYLX15_1315);南通大学研究生科技创新计划(KYC15004)

摘　　要：以广泛应用于旋涂功能薄膜工艺中的聚甲醛(POM)匀胶托盘为研究对象,基于数值仿真及实验研究,对现有POM托盘工作中的缺陷进行了分析,结果表明,螺旋托盘基片因发生翘曲形变而易使胶体渗入匀胶机,腔式托盘基片形变量过大。基于分析结果,对现有匀胶托盘进行了优化,提出一种腔式花洒型托盘,其通过过盈配合,在腔式托盘上装配花洒型端盖,数值模拟结果表明,腔式花洒型托盘在保持腔式托盘阻胶结构的基础上,基片最大形变量为2.7μm,与螺旋托盘相比降低了3.9μm左右,且基片边缘处的翘曲形变较小,为0.17μm左右;借助3D打印技术,对优化的托盘进行快速成型制造,并进行了实验分析,实验结果表明,基片形变测量值与数值模拟值变化规律吻合,相同位置的形变值误差最大为9.8%左右,说明仿真结果可靠。Polyformaldehyde （POM） spin coating pallet was taken as research object,which widely applied in spin coating film process. For the defects of existing POM spin coating pallet,the numerical simulation and experimental studies were carried out, the results indicate that substrate warpage deformation makes photoresist penetrate into spin coater during the use of the spiral spin coating pallet, and the cavity spin coating pallet substrate deformation is too large. Based on the analysis result, the shower cav-ity spin coating pallet is put forward and it is constituted by cavity spin pallet and shower cavity spin coating pallet end cover through interference fit,the numerical simulation resules show that shower cavity spin coating pallet could maintain cavity spin coating pal-let resist photoresist effect and substrate maximum deformation is about 2.7 μm,compared with the spiral spin coating pallet,it decreases by about 3.9 μm,and the warpage deformation at the substrate edge is small, about 0.17 μm. The shower cavity spin coating pallet is mamufactured based on 3D printing technology,experiments analysis were carried out,the results show that the substrate deformation is good agreement with the change rule of the simulation value, and the maximum error of the same position deformation value is about 9.8%, which indicates that the simulation results are reliable.

关 键 词：功能薄膜 聚甲醛匀胶托盘 优化设计 数值模拟 快速成型 

分 类 号：TQ326.51[化学工程—合成树脂塑料工业] TQ320.72