新型铝基共面微腔等离子体阵列在氖气中放电的光特性研究  

Novel Coplanar Microcavity Plasma Array on Aluminum Foil and Optical Characteristics of Discharge in Neon

作　　者：何兆[1] 张小宁[1] 梁志虎[1] 刘纯亮[1] 

机构地区：[1]西安交通大学电子物理与器件教育部重点实验室,西安710049

出　　处：《真空科学与技术学报》2017年第4期418-423,共6页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(No.61372018)

摘　　要：在厚度为100μm的铝基底上,制作了一种由隙缝相连的六边形共面微腔阵列,研究了方波驱动下,该微腔阵列在氖气中的放电发光分布与气压的关系,光谱分布及放电的演变过程。结果表明:这种隙缝相连的六边形共面微腔阵列放电时,随气压的升高,发光光强分布从腔体中心位置逐步向腔体侧壁移动,其发光光谱为588 nm的可见光和312 nm的紫外光。增强电荷耦合器件拍摄的阵列放电瞬时状态表明,在一个方波驱动周期的两次放电中,共面微腔等离子体阵列放电演变呈现出等离子波动传播的现象,且这两次传播方向相反,传播速度均为10~15 km/s。A novel type of the coplanar micro-cavity plasma array,consisting of hexagonal micro-cavities separated by conformal zig-zag slits,was fabricated on the 100 μm thick Al-foil glued on glass. Driven by a square pulse,the influence of the Ne pressure on the optical emission characteristics,time evolutions of glow discharge intensity distribution and spectral profile was investigated. The results show that the Ne pressure has a major impact on the glow discharge and properties of optical emission. To be specific,as the Ne-pressure increased,the emission intensity peak,including 588 nm visible and 312 nm ultra-violet lights,slowly shifted away from the cavity center in radial direction. Depending on the positive/negative halves of a square wave,the plasma wave propagated at 10 ~ 15 km/s in opposite directions,as shown in the photos taken with intensified charge coupled device video camera.

关 键 词：共面微腔等离子体阵列 光强分布 放电演变 波动传播 

分 类 号：TN136[电子电信—物理电子学]