小流量电液伺服阀叠合量气动测量台的研制  

Pneumatic Measuring System for Overlap Value of Low-flow Electro-hydraulic Servo Valve

作　　者：王卓[1] 黄川[1] 申振丰 刘小田 江金林 朱力敏 

机构地区：[1]华中科技大学自动化学院,湖北武汉430074 [2]上海航天控制技术研究所,上海201109

出　　处：《液压与气动》2017年第5期113-119,共7页Chinese Hydraulics & Pneumatics

摘　　要：为了提高小流量电液伺服阀叠合量的测量效率,实现叠合量气动测量过程的自动化,分析了电液伺服阀叠合量气动测量方法的原理及特点,采用压力式和流量式气动测量方法实现阀芯自动对中和叠合量自动精确测量。从机械结构设计和控制系统方案上提出了自动化策略,研制了一套小流量电液伺服阀叠合量气动测量台,实现叠合量高精度测量的全过程自动化。通过实验和工程实践验证,该测量台的叠合量测量精度达到±0.5μm,且重复精度达到±0.5μm。In order to improve the efficiency of measuring the overlap value for a low-flow electro-hydraulic servo valve and to realize the automatic measurement process, two press and flow pneumatic measuring methods of servo valve overlap value are introduced. This study synthesizes the two methods and leads to an automation pneumatic measuring circuit. An automation test strategy is proposed for the mechanical structure and the control system scheme. And a low-flow electro-hydraulic servo valve overlap value pneumatic measuring system is developed, and the fully automatic measurement process is achieved. Both the overlap measure accuracy and the repeatability preci- sion of the measuring system reach to ±0.5μm, which are validated by the experiment and engineering practice.

关 键 词：伺服阀 自动化 叠合量 气动测量 

分 类 号：TH138[机械工程—机械制造及自动化]