溅射薄膜拉力传感器设计及性能分析  

Design and Performance Analysis of Sputtering Thin-film Tension Sensor

作　　者：张恩凤 李永红[1,2] 岳凤英[3] 

机构地区：[1]中北大学仪器与电子学院 [2]山西科泰航天防务技术股份有限公司,太原030051 [3]中北大学计算机与控制学院,太原030051

出　　处：《科学技术与工程》2017年第4期230-233,249,共5页Science Technology and Engineering

基　　金：山西省青年基金(2012021013-6)资助

摘　　要：针对热真空环境下的拉力检测,研制了一种基于薄膜溅射工艺的双冗余拉力传感器。主要对溅射薄膜拉力传感器的弹性体结构和应变电阻布局进行了分析设计。针对传感器的零点输出误差设计了零点补偿电路;并对传感器的稳定性处理工艺进行了研究。最终,通过对传感器进行热真空试验,验证了该设计的合理性。实验结果表明,该拉力传感器可在-45℃^+90℃范围内正常工作,灵敏度为13.02 m V/k N,精度高于6‰。Aiming at the tensile testing of thermal vacuum environment, a kind of dual redundant tension sensor based on sputtering thin-film process is designed. The design of the structure of elastomer and the layout of strain resistance were mainly introduced. The circuit of zero compensation and stability process is also researched. Final-ly ,through the thermal vacuum test, the environmental adaptability of the tension sensor is verified. The experi-ment data proves that the tension sensor can work within - 45 -90℃ , sensitivity is much better than 13. 02 mV/kN and precision is higher than 6‰.

关 键 词：溅射薄膜 拉力传感器 零点补偿 稳定性处理 热真空 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]