真空蒸发镀膜  

Preparation of aluminum film by vacuum evaporation

作　　者：甄聪棉[1,2] 李壮志[1,2] 侯登录[1,2] 郭革新[1,2] 李玉现[1,2] 

机构地区：[1]河北师范大学物理科学与信息工程学院,河北石家庄050024 [2]河北师范大学河北省新型薄膜材料重点实验室,河北石家庄050024

出　　处：《物理实验》2017年第5期27-31,共5页Physics Experimentation

摘　　要：针对真空蒸发制备铝膜进行了详细地介绍,主要包括了真空的获得、真空的测量以及蒸发制备铝的的原理和主要事项进行了深入地探讨,改进工作对真空系统的理解和掌握有着指导意义.The preparation of aluminum film by vacuum evaporation was introduced in detail. The creation and detection of vacuum, the principle of evaporation and the important notes were presented. This work was a guidance for understanding and mastering vacuum system.

关 键 词：真空 蒸发镀膜 平均自由程 

分 类 号：O484[理学—固体物理]