X光显微成像测试技术应用于LTCC流延片激光打孔的研究  

Study on X-ray Microscopic Imaging and Measuring Technique Applied in Laser Drilling Micro-hole on the LTCC Cast films

作　　者：冯子琪[1] 陈虹[1] 何凤玺 杨桂栓[1] 陈涛[1] 

机构地区：[1]北京工业大学激光工程研究院,北京100124

出　　处：《应用激光》2017年第2期256-261,共6页Applied Laser

基　　金：国家重大科学仪器设备开发专项资助项目(项目编号:2011YQ030112)

摘　　要：对约400μm厚的低温共烧陶瓷流延片进行准分子激光微孔加工工艺实验研究。由于低温共烧陶瓷流延片黏结性强并且微孔结构较小,提出了采用X光显微成像测试的方法对微孔内部结构轮廓的检测,对激光微孔加工的孔腔结构形成进行了分析研究。研究结果表明,在一定范围内,随着激光打孔脉冲个数的增加及激光能量密度的增大,所获得的微孔的锥度减小;较高能量密度的激光束可以提高对低温共烧陶瓷流延片的激光打孔效率,但过高能量密度的激光束刻蚀材料时对微孔周围的基材产生较强的冲击,易导致微孔结构的破坏,对孔型质量造成严重影响。研究采用的X光显微成像测试技术能够快速获得完整的微孔内腔的轮廓图,对提高激光打孔效率和改善孔型结构质量提供一定的参考意义。The research about excimer laser processing micro-hole on LTCC cast film which is about 400μm thick is briefly presented in this paper. Because of the raw porcelain LTCC cast film has strong bond ability and small micro-hole structure, X- ray microscopy test method is proposed to detect micro-hole internal structure and the formation of laser processing of hole cavi- ty structure was analyzed. The results show that, with the increase of the number of laser pulses and the laser energy density, the taper of micro-hole is decreased,and the higher laser energy density of laser beam can improve the efficiency of laser drilling on LTCC cast film, but too high laser energy density have strong impact on the base material around micro holes which can cause destruction of the micro-hole structure and has serious influence on the quality of the micro-hole. The X-ray microscopy technique used in this study can quickly obtain the complete profile of the micro-hole cavity,which can provide some reference for improving the laser drilling efficiency and the quality of micro-hole structure.

关 键 词：X光显微成像 低温共烧陶瓷流延片 微孔加工 准分子激光打孔 

分 类 号：TN249[电子电信—物理电子学] TM281[一般工业技术—材料科学与工程]