InP基矩形马赫-曾德高速电光调制器行波电极设计与测试  

Design and Characterization of Traveling-wave Electrodes for InP-based Rectangular Mach-Zehnder High Speed Electro-optic Modulators

作　　者：赵丽亚[1] 王乐[1] 杨妍 刘克[1,3] 

机构地区：[1]北京工业大学光电子技术省部共建教育部重点实验室信息学部,北京100124 [2]School of Electrical and Electronic Engineering,Nanyang Technological University,singapore639798 [3]Department of Electrical and Computer Engineering,George Washington University

出　　处：《光子学报》2017年第5期132-141,共10页Acta Photonica Sinica

基　　金：国家自然科学基金(No.61377059);北京市自然科学基金(No.4142004);教育部留学回国人员科研启动基金;2017年科技创新服务能力建设-科研基地建设-重点实验室-光电子技术教育部重点实验室(市级)项目(No.PXM2017-014204-500034)资助~~

摘　　要：提出了一种由新型沟槽耦合器和90°弯曲波导构成的InGaAsP/InP基矩形马赫-曾德电光调制器,对该调制器的L型波导相移臂设计了T型类微带行波电极.首先利用电极的等效电路估算带宽上限,进而在考虑阻抗匹配、回波损耗以及带宽等性能的基础上,使用有限元方法对电极的传输、输入/输出以及过渡区的结构参量进行优化.仿真结果表明由于受到电极输入及过渡区的性能限制,设计的整体行波电极匹配阻抗大于42Ω,回波损耗小于-15dB,带宽可达65GHz.测试制备的Ti/Au行波电极,得到回波损耗为-12dB和带宽为20GHz的最优性能.An ultra-compact rectangular Mach-Zehnder （MZ） interference Electro-Optic （EO） modulator on InGaAsP/InP platform was proposed. This modulator consists of novel trench couplers and 90° waveguide bends. T type microstrip Travelling-Wave （TW） electrodes were designed for the L-shape waveguide phase shift arm of the MZ modulator. First of all, an upper bandwidth limit of this modulator was evaluated by using an equivalent circuit model of the TW electrodes. According to microwave characteristics such as impedance match, return loss and bandwidth, the transmission and input/output of electrodes and structure parameters of transition regions were optimized through a finite element analysis method. The simulation results show that being limited by the input of electrodes and transition regions, the overall TW electrodes exhibit an impedance match of 〉42Ω, return loss of 〈-15 dB and bandwidth of 65 GHz. Experimentally the return loss of -12 dB and the bandwidth of 〉20 GHz are obtained in terms of the fabricated Ti/Au electrodes on an InP substrate.

关 键 词：集成光学 电光调制器 有限元法 行波电极 特征阻抗 S参量 

分 类 号：TN256[电子电信—物理电子学]