离子交换法制备铒镱磷酸盐波导光放大器  

Erbium Ytterbium Co-doped Phosphate Waveguide Amplifier Based on Ion Exchange Method

作　　者：李乐良[1] 张雪琼[1] 张琦[1] 

机构地区：[1]赣南师范大学物理与电子信息学院,江西赣州341000

出　　处：《赣南师范大学学报》2017年第3期35-38,共4页Journal of Gannan Normal University

基　　金：国家自然科学基金项目(61650404);江西省教育厅科技一般项目(GJJ151000);赣南师范大学科研课题(16zb05;16zb04;13kyz12)

摘　　要：采用离子交换法制备铒镱共掺磷酸盐波导光放大器,实验研究交换熔盐中的Ag离子浓度和交换时间对波导折射率和深度的影响.首先通过微电子的一些基本工艺制备8μm,10μm以及12μm宽度的Al条形掩模,并根据不同的AgNO_3浓度以及不同的交换时间得到不同的波导深度样品.然后在光学位移平台上对制备的条形波导进行测试,其中10μm宽,6μm深的条形波导的信号光输出功率为9μW,信号光净增益达3.0 d B/cm.Erbium ytterbium co-doped phosphate waveguide amplifier was prepared by ion exchange method. The effects of Ag ion concentration and exchange time on the refractive index and depth of the waveguide were investigated. The 8μm, 10 μm and 12 μm width A1 strip mask were fabricated by the basic technology of microelectronics, and the different waveguide depth samples were obtained according to different AgNO3 concentration and different switching time. At last, the channel waveguides were measured on the optical displacement platform. The signal output power was about 9 μW and the net gain was 3.0 dB/cm for 10μm width, 6 μm depth channel waveguide.

关 键 词：离子交换 铒镱共掺 磷酸盐 铒掺杂波导光放大器 

分 类 号：TN252[电子电信—物理电子学]