基于椭圆偏振显微镜的纳米级磁头润滑膜观测方法  

Visualization of nanometer head slider lubricant films based on ellipsometric microscope

作　　者：刘卿卿[1,2] 苏杨[1] 

机构地区：[1]南京信息工程大学信息与控制学院,江苏南京210044 [2]南京信息工程大学大气环境与装备技术协同创新中心,江苏南京210044

出　　处：《应用光学》2017年第3期434-437,共4页Journal of Applied Optics

基　　金：江苏省自然科学基金(BK20130989);南京信息工程大学引进人才启动基金(2013R106)

摘　　要：针对磁头飞行导致液体润滑膜的转移研究以及润滑膜在磁头上的动态变化特性观测问题,基于改进的垂直物镜的椭圆偏振显微镜,提出起偏器相移方法的磁头表面润滑膜厚度计算模型,实现了润滑膜厚度的测量。实验以非极性润滑剂Z03覆盖的磁头为样品对椭圆偏振显微镜进行标定,以极性润滑剂Zdol4000作为样品,对其在磁头表面的去湿现象进行观察。该方法测量精度可达0.37nm,分辨力约0.36μm,可为其他纳米级薄膜观测提供一定的技术参考。Aiming at the problems of shift of lubricant films on head slider, and dynamic change visualization of lubricant films on head slider, this paper presents caculation model of lubricant thickness distribution on a head slider surface using phase shift method, which is base on im- proved vertical-objective-based ellipsometric microscope （VEM）. Measurement of lubricant film thickness is achived with this method. Taking nonpolar perfluoropolyether （PFPE） lubri- cant Z03 as a sample, ellipsometric microscope is calibrated~ while taking polar PFPE lubricant Zdol4000 as a sample, dewetting on head slider surface is observed. Experimental results show measuring accuracy and resolution are 0.37 nm and 0.36 μm respectively. This can be refer- ence for other visualization of nm lubricant films.

关 键 词：光学测量 润滑膜观测 椭圆偏振显微镜 起偏器相移 

分 类 号：TH742[机械工程—光学工程]