薄膜体声波谐振器横向杂散模式三维仿真分析  

3D Simulation of the Spurious Lateral Modes of FBAR

作　　者：张玲玲[1] 刘梦伟[1] 李鉴[1] 宫俊杰[1] 汪承灏[1] 

机构地区：[1]中国科学院声学研究所声场声信息国家重点实验室,北京100190

出　　处：《压电与声光》2017年第3期327-330,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(11374327)

摘　　要：利用有限元分析软件ANSYS建立了FBAR三维振动模型,分析了不同有效区域形状(方形、圆形、非正五边形)、不同有效区域面积(10 000μm^2、15 625μm^2、22 500μm^2、30 625μm^2、40 000μm^2)和不同压电层材料(AlN、ZnO)对其横向杂散模式的影响,得到了阻抗特性曲线及不圆度(NC)。有效区域形状为非正五边形时,得到最平滑的阻抗曲线和最小的NC值为0.015 1;有效区域面积为40 000μm^2时得到最小的NC值为0.005 5;在相同谐振频率(1.76GHz)下,用ZnO作压电材料时得到较小的NC值为0.012 9。The 3Dfinite element model of FBAR was established using ANSYS to analyze the effects of spurious lateral modes caused by different shape and area size of the active region and by the different piezoelectric materials.The shapes of the active area were the square,circular and irregular-pentagon.The area sizes were 10 000μm^2、15 625μm^2、22 500μm^2、30 625μm^2、40 000μm^2 and the piezoelectric materials were AlN and ZnO.The impedance characteristic curve and none-circularity NC were obtained.FBARs with irregular-pentagon active area had the most smooth impedance characteristic curve and the smallest value of NC is 0.015 1.The value of NC and the spurious lateral modes decreased with the the increase of the active area and the smallest value of NC was 0.005 5with the area size being 40 000μm^2.Operating at the same frequency of 1.76 GHz,the smallest value of NC is 0.012 9with ZnO being the piezoelectric material.

关 键 词：薄膜体声波谐振器 谐响应 横向杂散模式 有限元 

分 类 号：TN713[电子电信—电路与系统]