弛豫铁电单晶超声电机的仿真与试验研究  

Simulation and Experimental Study on Application of Relaxor Ferroelectric Single Crystals to Ultrasonic Motor

作　　者：史翔[1] 魏晓勇[1] 李振荣[1] 徐卓[1] 崔玉[1] 

机构地区：[1]西安交通大学电子陶瓷与器件教育部重点实验室国际电介质研究中心,陕西西安710049

出　　处：《压电与声光》2017年第3期336-340,共5页Piezoelectrics & Acoustooptics

基　　金：国家"九七三"计划基金资助项目(2015CB6546020);产业技术研究与开发基金资助项目(2013DFR50470);高等学校学科创新引智计划基金资助项目(B14040)

摘　　要：弛豫铁电单晶以其良好的压电性能和低温适应性成为超声电机性能提升理想的替代材料。由于单晶物理性能的各向异性,在单晶超声电机设计过程中必须考虑振幅均匀性和振型干扰问题。该文通过对两种具有振幅均匀性的单晶切向进行压电、介电、弹性性能的计算和有限元分析,分析了单晶超声电机定子的工作频率、振幅和振幅均匀性;设计制作了单晶超声电机样机,并对其进行了测试。结果表明,20mm单晶超声电机堵转扭矩达到0.057N·m,优于同直径的压电陶瓷超声电机。The relaxor ferroelectric single crystals have become an ideal substitute materials for improving the performance of ultrasonic motor as their excellent piezoelectric performance and cryogenic property.But the amplitude uniformity of stator and the interference of vibrations have to be considered in the process of single crystal ultrasonic motor design due to the anisotropy of single crystals.The operating frequency,amplitude and amplitude uniformity of stator are analyzed through the calculation and the finite element analysis of the piezoelectric,dielectric and elastic performance of two cutting orientations with amplitude uniformity.A prototype of single crystal ultrasonic motor is designed and fabricated.The results show that the proposed single crystal ultrasonic motor with20mm has a locked-rotor torque of 0.057N·m,which is better than that of the piezoelectric ceramic ultrasonic motor with the same diameter.

关 键 词：弛豫铁电单晶 超声电机 切型 振幅 

分 类 号：O732.1[理学—晶体学] TN602[电子电信—电路与系统]