节距自适应三维目标光栅测量方法  

An Adaptive Grating Pitch Measurement Method

作　　者：孙奎[1] 张胜[1] 陈亚群[1] 陈建飞[1] SUN Kui ZHANG Sheng CHEN Ya-qun CHEN Jian-fei(School of Optoelectronic Engineering, Nanjing University of Posts ~ Telecommunications, Nanjing 210046, China)

机构地区：[1]南京邮电大学光电工程学院,南京210046

出　　处：《光通信研究》2017年第3期33-36,共4页Study on Optical Communications

基　　金：国家自然科学基金资助项目(61601237);江苏省自然科学基金资助项目(KB20160901)

摘　　要：针对三维光栅测量中难以有效设置光栅节距实现高精度测量的问题,提出了一种节距自适应三维目标光栅测量方法,其实现过程如下:首先基于大节距光栅获取物体的轮廓;然后采用非联通区域划分法,按轮廓对目标区域进行划分,再分区调整光栅节距,进行二次投影;最后依据光栅节距按区域重建,实现三维目标高精度测量。仿真结果表明,与传统四步相移法相比,该方法通过自适应调整光栅节距,使测量精度提高了6.78%,表明该方法能较好地实现三维目标的精确测量,具有较高的实用价值。In order to solve the problem of high precision measurement of grating pitch in three-dimensional grating measure-ment, an adaptive three-dimensional object grating pitch measurement method is presented in this paper. Its implementationprocesses are as follows： obtain the object outline based on a large pitch grating; according to the achieve outline, divide thetarget area by non-Unicorn zoning laws; adjust the partition grating pitch and take second projection; according to the dividedtarget area, reconstruct the three-dimensional object to achieve high-precision measurement regionally. The simulation resultsshow that compared to the traditional four-step phase shift method, the measurement accuracy of the proposed method （withthe adaptive grating pitch ） is increased by 6.78 %, indicating that the proposed method can achieve the three-dimensional ob-ject measurement more accurately, which also has good practical value.

关 键 词：三维测量 光栅节距 自适应 区域划分 

分 类 号：TN247[电子电信—物理电子学]