中波红外双通道带通滤光片的研制  

Study and preparation of mid-infrared dual channel band-pass filter

作　　者：王松林[1] 米高园[1] 张建付[1] 杨崇民[1] 刘青龙[1] 王颖辉[1] 韩俊[1] WANG Song-lin MI Gao-yuan ZHANG Jian-fu YANG Chong-min LIU Qing-long WANG Ying-hui HAN Jun(Xi＇an Institute of Applied Optics,Xi＇an 710065 ,China)

机构地区：[1]西安应用光学研究所,陕西西安710065

出　　处：《激光与红外》2017年第6期740-744,共5页Laser & Infrared

摘　　要：采用在单晶锗基底的两面分别设计中波红外带通滤光膜和中波红外负滤光膜的方法,设计了一种光谱性能优良的中波红外双通道带通滤光片。以适当的工艺技术完成了膜层的制备,并测试了实验样片的红外透射率光谱。结果显示,制备的中波红外双通道带通滤光片的通带透过率以及截止带截止深度均良好。由实验结果分析可知,镀膜材料蒸发角的变化和各层膜厚误差的累积,是导致实验片的测试光谱在截止带内出现两个较强的次峰,以及中间截止带略微偏移的主要原因。A mid-wave infrared dual channel band-pass filter with good spectral property was designed by coating a mid-infrared band-pass filter film on Ge substrate one side and a mid-infrared negative filter film on the other side. Films were deposited by different processes, and the infrared transmittance of the filter was tested by infrared spec- trometer. The results show that band-pass transmittance and the cut-off depth of rejection zone are both good. The change of evaporation angles and accumulation of layer thickness errors are main causes that there are two stronger second peaks in rejection zone and the middle of the rejection zone slightly shifts.

关 键 词：双通道带通滤光片 中波红外 截止带 透过率 

分 类 号：TN214[电子电信—物理电子学]