横向磁通径向位移传感器研究  

Research on transverse flux radial displacement sensor

作　　者：薛莲晓 张剀[1] 徐旸[1] 刘哲鸣 

机构地区：[1]清华大学工程物理系,北京100084 [2]北京博工兴业工程咨询有限责任公司,北京100041

出　　处：《仪器仪表学报》2017年第5期1249-1256,共8页Chinese Journal of Scientific Instrument

摘　　要：横向磁通传感器是一种对转子径向位移进行测量的新型传感器。与传统的涡流或电感式传感器相比,其凭借独特的探头设计,具有高性价比、高精度、高灵敏度、结构紧凑等优点。通过理论分析,研究了影响该传感器灵敏度的若干因素。建立有限元模型,通过仿真明确了传感器探头设计的要点,总结了设计规律。设计并优化实验电路,搭建实验平台完成了对传感器的性能测试,结果表明该传感器具有良好的灵敏度、线性度和极低的X-Y耦合度。将此传感器成功应用于某主动式磁轴承转子的位移检测,实现了稳定悬浮,并且转速达到了12 000 r/min。The transverse flux sensor （TFS） is a new type of sensor designed for rotor radial displacement measurement. Compared with conventional eddy current or inductive sensors, relying on its unique probe design, TFS has the advantages of high cost-efficiency, high accuracy, high sensitivity and ultra-compact structure. Through theoretical analysis, the factors influencing the sensitivity of the sensor are researched. With establishing the finite element model, the key points of the sensor probe PCB design are clarified with simulation, and then the design rules applied to TFS are summarized according to the simulation results. The experiment circuit was designed and optimized, the experiment platform was built, and the performance test of the sensor was completed. Experiment results show that the sensor has good sensitivity, linearity and very low X-Y coupling. The TFS was successfully applied to the rotor displacement measurement of an active magnetic bearing system, and a stable levitation at 12 000 r/min was achieved.

关 键 词：横向磁通 电涡流传感器 有限元分析 主动式磁轴承 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置] TH822[自动化与计算机技术—控制科学与工程]