等离子喷涂-物理气相沉积射流中粒子状态和分布  

State and Distribution of Particles in Jet of Plasma Spray-Physical Vapor Deposition

作　　者：邓子谦[1,2,3] 刘敏[4,2,3] 毛杰 邓春明 马景涛 陈志坤 

机构地区：[1]广东工业大学材料与能源学院,广州510006 [2]广东省新材料研究所现代材料表面工程技术国家工程实验室,广州510651 [3]广东省新材料研究所广东省现代表面工程技术重点实验室,广州510651 [4]中南大学材料科学与工程学院,长沙410083

出　　处：《中国表面工程》2017年第3期81-88,共8页China Surface Engineering

基　　金：广东省自然科学基金(2016A030312015);广东省(广州市)科学技术合作项目(2013B050800027;201508030001)~~

摘　　要：采用等离子喷涂-物理气相沉积(PS-PVD)在高温合金基体上沉积7YSZ热障涂层,通过分步沉积实验、径向和轴向的涂层结构分布实验探讨了涂层中各种粒子的种类、形成原因、对涂层结构的影响及射流中的粒子分布。研究表明:PS-PVD实际上是一种以气相沉积为主,多相混合的沉积方式。涂层的沉积过程中,气相沉积是柱状晶形成的主要原因;熔融及部分熔融的大颗粒对可以直接改变柱状结构的生长状态;气相再凝固和气化不充分残留的小颗粒对涂层的影响是一个累积的过程。气相主要集中在射流中心,越靠近射流边缘,部分熔融粒子的比例越高,最终导致PS-PVD沉积涂层结构出现空间分布特征。7YSZ coatings were prepared by plasma spray-physical vapor deposition （PS-PVD） technique based on the differential step deposition, the radial and axial distributing experiments. The species and formation, their effect on the coating structure and performance, and the distribution in the jet of different particles in the coatings were studied. The results show that the actual PS-PVD process is a deposition method of mixed gas/liquid/solid phase，which is mainly gas-phase deposition. Gas phase is the primary cause for the formation of columns crystal. Large particles （droplet or partial-molten particles） could easily interfere with their growth. The accumulation of small particles （remains or re-solidified ones） also has influence on the coating structure, while it changes relatively slowly. Most gas phase distributes in the center of plasma jet. Away from the center, the proportion of partial-molten particles increases with the radius. The state and distribution of particles in jet result in the regional characteristic of 7YSZ coatings.

关 键 词：等离子喷涂-物理气相沉积(PS-PVD) 涂层生长 空间分布 熔滴/固态颗粒 

分 类 号：TG174.442[金属学及工艺—金属表面处理]