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作 者:ZHU Xifu JING Xiaojun DU Huan
机构地区:[1]Teacher's colleage, Beijing Union University, Beijing 100101, China [2]School of Information and Communication Engineering, Beijing University of Posts and Telecommunications, Beijing 100876, China [3]Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
出 处:《Chinese Journal of Electronics》2017年第3期654-657,共4页电子学报(英文版)
基 金:supported by the National Program on Key Basic Research Project(973 Program)(No.001CB610601)
摘 要:Co/Pt multilayer dots arrays with 580-nm periodicity were fabricated using Laser interference lithography(LIL)and an ion-beam milling technique.We obtained uniform dots arrays with a large area by optimizing the exposure parameters and improving exposure conditions.We obtained their shapes and magnetic domain structures and investigated using an Atomic force microscope(AFM)and Magnetic force microscope(MFM).The AFM and MFM images show:1)when their size is smaller than 400nm,the dots are in single-domain state and their shape tends to be circular;and 2)when their size is greater than 400nm,the dots are in multi-domain state and they tend to form squares.The dots arrays possibly can be used in nano-scale magnetic storage.Co/Pt multilayer dots arrays with 580-nm periodicity were fabricated using Laser interference lithography (LIL) and an ion-beam milling technique. We obtained uniform dots arrays with a large area by optimizing the exposure parameters and improving exposure conditions. We obtained their shapes and magnetic domain structures and investigated using an Atomic force microscope (AFM) and Magnetic force microscope (MFM). The AFM and MFM images show: 1) when their size is smaller than 400nm, the dots are in single-domain state and their shape tends to be circular; and 2) when their size is greater than 400rim, the dots are in multi-domain state and they tend to form squares. The dots arrays possibly can be used in nano-scale magnetic storage.
关 键 词:Magnetic domain structures Co/Pt dots arrays AFM and MFM images Single domain state Multi-domain state
分 类 号:TN249[电子电信—物理电子学]
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