非破坏性玻璃亚表面缺陷定量检测新方法  

New Method for Non-Destructive Quantitative Measurement of Subsurface Damage Within Glasses

作　　者：伍秀玭 高万荣[1,2] 张运旭[1,2] 何勇[1,2] 

机构地区：[1]南京理工大学电子工程与光电技术学院光学工程系,江苏南京210094 [2]南京理工大学先进固体激光工业和信息化部重点实验室,江苏南京210094

出　　处：《中国激光》2017年第6期157-164,共8页Chinese Journal of Lasers

基　　金：国家自然科学基金(61275198;60978069;11473017)

摘　　要：提出了一种基于频域光学相干层析成像(SDOCT)技术的非破坏性玻璃亚表面缺陷(SSDs)定量检测新方法,描述了所搭建SDOCT系统的成像原理和特性,给出了所重建的玻璃SSDs二维和三维图像。利用所获得的图像,可以定量获得玻璃SSDs的深度、尺寸和形状。该研究结果对光学零件的加工和应用具有重要意义。A new method for the non-destructive quantitative measurement of subsurface damages （SSDs） within glass samples is proposed based on the spectral-domain optical coherence tomography （SDOCT） technology. The imaging principle and characteristics of the built SDOCT system are illustrated. The reconstructed two- and three- dimensional images of glass SSDs are given, from which the depths, sizes and shapes of glass SSDs can be obtained quantitatively. These results have significant importance for the manufacture and the applications of optical components.

关 键 词：材料 频域光学相干层析成像术 玻璃亚表面缺陷 非破坏性检测 定量检测 

分 类 号：TH741[机械工程—光学工程]