长曲率半径测量系统精度设计及分析  

Precision Design and Analysis of Large Curvature Radius Measurement System

作　　者：魏凤龙 田伟[1] 彭石军[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所超精密光学工程研究中心,吉林长春130033

出　　处：《激光与光电子学进展》2017年第6期147-152,共6页Laser & Optoelectronics Progress

基　　金：国家科技重大专项-02专项基金(2009ZX02205)

摘　　要：根据高精密光学系统的需求,结合目前的研究成果,基于干涉测量法研制了长曲率半径测量系统。分析了影响长曲率半径测量系统测量精度的多种误差因素,根据误差理论和系统组成建立了长曲率半径测量系统误差分配的数学模型和误差分配树。结合系统的整体使用需求,对系统测量精度的目标不确定度进行了分配和合成。结果表明,根据分配结果得到的标准不确定度为2.49μm,小于系统要求的目标不确定度2.5μm。以此分配结果作为各子系统结构设计的输入指标,总结并提出了提高曲率半径测量精度的措施,根据误差分配结果设计了符合使用需求的长曲率半径测量系统。According to the demand of high precision optical system and the present research achievements, a large curvature radius measurement system is developed based on the interferometrie measurement. Error factors affecting the measurement precision of the developed system are analyzed, and a mathematical model of error distribution and an error distribution tree of the measurement system are established based on the error theory and the system composition. Combined the actual usage requirements, the target uncertainty of the measurement precision of the system is distributed and then combined. Results show that the standard uncertainty is 2.49 μm, and it less than 2.5 μm which is the target uncertainty required by the system. The distribution result is used as the input index for the design of subsystem structures. Measures that can improve the measurement precision of curvature radius are proposed and summarized. According to the error distribution result, a system for measuring large curvature radius which can satisfy the using requirements is designed.

关 键 词：测量 长曲率半径 精度设计 误差分配 不确定度合成 

分 类 号：O439[机械工程—光学工程]