OLED封装材料气体渗透率的静态积累式进样质谱法测量  

Measuring gas penetration rates of OLED packaging materials by mass spectrometry method with static accumulation sampling

作　　者：吴启鹏[1] 付朝晖[1] 李军建[2] 王春勇[1] 

机构地区：[1]兰州空间技术物理研究所,兰州730000 [2]电子科技大学光电信息学院,成都610054

出　　处：《真空》2017年第3期32-36,共5页Vacuum

摘　　要：如何测量封装材料的气体渗透率是OLED封装技术研究中的一个重要问题。本文提出了静态积累式进样质谱法来测量OLED封装材料的气体渗透率,设计了静态积累式进样质谱法测量系统,对柔性OLED封装材料PET薄膜的气体渗透率进行了测量,并分析了测量系统的灵敏度,结果表明,静态积累式进样质谱法测量OLED封装材料气体渗透率是可行的,且渗透时间为100天时,静态积累式进样质谱法对水蒸气的测量灵敏度可达4×10^(-5)g/m^2day。如果渗透时间进一步延长,静态积累式进样质谱法的测量灵敏度有望达到理想的1 10^(-6)g/m^2·day量级。对比动态抽除式进样质谱法,静态积累式进样质谱法的灵敏度提高了1-2个数量级,有效提升了质谱法的灵敏度。The measurement of gas penetration rates of packaging materials is important for OLED packaging technology. To measure the gas penetration rates, a mass spectrometry method was presented by using static accumulation sampling, and a measuring system was designed. The gas penetration rates of PET films were measured, and the sensitivity of the measuring system was analyzed. The results indicate that the method is flexible, and the penetration time is 100 days, the sensitivity is 4×10^-6g/m2day and it could be expected to reach 1×10^-6 g/m2 day magnitude if the penetration time prolonged. Compared with that of the mass spectrometry method using dynamic extraction sampling, the sensitivity of this method is improved for 1-2 magnitudes, which effectively improves the sensitivity of mass spectrometry method.

关 键 词：质谱法 静态积累式进样 OLED封装材料 灵敏度 

分 类 号：TB771[一般工业技术—真空技术]