热处理气氛对溶胶--凝胶法Al∶ZnO膜特性的影响  

Effects of Annealing Atmospheres on the Characteristic of Al-doped ZnO Films via Sol-gel Method

作　　者：闫明姝 娄有信[1,2] 杨子 周海峰[1] 张莹[1] 赵玉军[1,2] 沈建兴[1,2] 

机构地区：[1]齐鲁工业大学材料科学与工程学院,济南250353 [2]齐鲁工业大学山东省玻璃与功能陶瓷加工与测试技术重点实验室,济南250353 [3]河南科学院河南建筑材料研究设计院有限责任公司绿色建材重点实验室,郑州450002

出　　处：《齐鲁工业大学学报》2017年第2期27-30,共4页Journal of Qilu University of Technology

基　　金：山东省青年基金(2016ZRB01ANP);国家级大学生创新创业训练计划项目(201510431021);河南省自然科学基金(0162300410045)

摘　　要：采用溶胶—凝胶旋涂技术在玻璃衬底上制备Al∶ZnO薄膜(AZO)。在500℃条件下,利用氮气和氢气两种气氛分别对样品进行热处理,并对热处理后的薄膜特性进行研究。结果表明,上述两种气氛下所制薄膜都具有六方纤锌矿结构与C轴择优取向性;扫描探针显微结果表明,氮气气氛下薄膜形貌呈金字塔形,与氢气气氛所制薄膜差异明显;紫外可见光透射光谱图结果表明,氢气气氛下所制薄膜可见光透过率超过60%,高于氮气气氛所制样品,这可能与薄膜表面形貌有关。In this paper,the Al-doped ZnO films were fabricated on thin glass substrates by the sol-gel spin coating method.After that,the annealing process was carried out at 500 ℃ in N2 and H2 atmospheres,respectively.The effects of annealing atmospheres on the characteristic of the Al-doped ZnO films have been investigated.The results indicated that both of the as-deposited films retained typical hexagonal wurtzite structure and showed preferential c-axis orientation.The 3-D scanning probe microscopy spectra has revealed the pyramide-like grain structure of the films annealed in N2 atmosphere,which is distinct from that annealed in H2 atmosphere.The optical transmittance of the films annealed in H2 atmosphere has reached more than 60%,much higher than that in N2 atmosphere,which is probably controlled by the surface topography.

关 键 词：ZNO 溶胶—凝胶 薄膜 微观结构 

分 类 号：O484.1[理学—固体物理]