多弧离子镀对涂层厚度的影响  

Effect of multi-arc ion plating on coating thickness

作　　者：王蕾[1] 陈楠[1] 

机构地区：[1]长春理工大学光电信息学院机电工程分院,吉林长春130012

出　　处：《石化技术》2017年第6期71-72,共2页Petrochemical Industry Technology

摘　　要：本文采用多弧离子镀技术在奥氏体不锈钢表面沉积Ti-Al-N三元化合物涂层,并研究了多弧离子镀工艺参数对涂层厚度的影响。结果表明:负偏压对涂层厚度影响最大,时间次之,靶电流影响较小,氮气通量的影响程度最小。Ti-Al-N ternary compound coatings are deposited on the Austenitic stainless steel surface by using multi-arc ion plating process in this paper,and the effect of the process parameters of multi-arc ion plating on the coating thickness is also researched. The results show that negative bias voltage has the greatest influence on the coating thickness,followed by the deposition time and the target current,and the N2 flux is the least.

关 键 词：多弧离子镀 涂层 靶电流 

分 类 号：TG174.4[金属学及工艺—金属表面处理]