MOS电容型微小空间碎片探测器探头研究  

MOS capacitance probe for micro space debris detector

作　　者：郝志华[1] 向宏文[1] 蔡震波[1] 王金延[2] 

机构地区：[1]北京空间飞行器总体设计部,北京100094 [2]北京大学微电子研究所,北京100871

出　　处：《航天器环境工程》2017年第3期306-311,共6页Spacecraft Environment Engineering

基　　金：国家国防科工局空间碎片专项"十二五"预先研究项目

摘　　要：MOS电容传感器具有结构简单、可靠、功耗小等优点,在国外已被成功用于微小空间碎片在轨探测,但国内开展的相关研究还较少。文章在对MOS电容传感器探测微小空间碎片原理及过程进行分析的基础上,基于ADS软件建立了传感器电路模型,确定了影响传感器探测性能的关键参数,完成了传感器的设计及研制,进而研制了阵列式探头。最后对阵列式探头成功开展了地面高速微粒撞击试验,探头在经过了数十次高速微粒撞击后,仍能对高速撞击事件进行测量,初步验证了使用该探头开展在轨微小空间碎片探测是可行的。Due to its advantages of simple structure, credibility and low-power consumption, the metal-oxide-silicon （MOS） capacitance type sensor is successfully used in foreign countries to detect the orbital micro-debris, but so far not in domestic studies. In this paper, the detection principle of the MOS capacitance sensor is introduced. A charging and discharging model for the orbital micro-debris impact MOS capacitance sensor is built. Then the simulation is carried out by using ADS software. The MOS capacitance sensor’s key parameter is confirmed and the structure and process design of MOS capacitance sensor is completed. Based on the sensor, an array probe is designed and fabricated. Finally, with the array probe, the ground high-speed particulate impact test is carried out. The array probe sensor has experienced dozens of high-speed impacts, without affecting its ability to measure the high-speed impact event, which verifies the feasibility of using the probe for the on-orbit space micro-debris detection.

关 键 词：微小空间碎片 MOS电容传感器 阵列式探头 

分 类 号：V423.6[航空宇航科学与技术—飞行器设计]