纳米级人工超晶格多层膜的X射线广角衍射分析  

X-ray Wide-angle Diffraction Analyses of Multi-layer Films on Nano-sized Artificial Superlattices

作　　者：王耀东[1] 

机构地区：[1]昆明贵金属研究所,云南昆明650221

出　　处：《昆明理工大学学报（理工版）》2002年第4期16-18,21,共4页Journal of Kunming University of Science and Technology(Natural Science Edition)

摘　　要：作者导出人工超晶格多层膜的X射线衍射的几何光学图 ,得出多层膜的Bragg方程 ,并讨论因装放样品而导致样品轴偏心的精细误差消除步骤 .用普通广角X射线衍射仪 ,在低角区得到纳米级单、多层膜的调幅波长 (厚度 )及周期 .The paper reports on X-ray diffraction geometric photic patterms on artifical superlattices ,presents Bragg equation of multi-layer films ,discusses the procedures of eliminating fine error caused by mounting samples in axes incorrectly ,and shows wavelengths(thicknesses) of amplitude modulation and periods on mono-,multi-layers of nano-sized artifical superlattices under convetional wide-angle diffractometer from lower angles.

关 键 词：纳米级人工超晶格多层膜 X射线广角衍射分析 几何光学图 BRAGG方程 

分 类 号：O484.43[理学—固体物理] O484.5[理学—物理]