激光环境散射率测量装置的设计  

Design of Measuring Device for Laser Environment Scattering Rate

作　　者：高爱华[1] 彭东东[1] 闫丽荣[1] 

机构地区：[1]西安工业大学陕西省薄膜技术与光学检测重点实验室光电工程学院,西安710021

出　　处：《实验室研究与探索》2017年第6期58-61,共4页Research and Exploration In Laboratory

基　　金：陕西省工业科技攻关项目(2015GY048);总装基金项目(9140A18020214BQ52001)

摘　　要：设计了一种大气环境散射率测量装置,用于测量普通大气环境中粒子对激光散射率,用以反映测量环境对光束的散射程度,进而评估测量环境能否满足散射测量。该装置以稳功率激光器为光源,让光束穿过积分球空腔,使空腔内的粒子在空腔内发生散射,从而散射光都被积分球所收集,再使用光电倍增管测量积分球收集的散射光强,并采用相关检查方法进行信号处理,有效去除背景噪声。在实验室环境进行了测量,结果表明,测量精度最高可达0.1×10^(-6),装置误差达到±2%,实现了散射率的高精度测量。In some high precision optical measurement,the scattering particles in the normal atmospheric environment will produce interference on the measurement results. Particularly,if the signal is very weak,the impact will not be ignored,such as the detection of ultra smooth optical surface,high reflecting mirror scattering rate,etc. we need to consider the environmental impact on the measurement results. To solve the problem,an atmospheric scattering rate measuring device is introduced for measuring the ordinary particles in the atmospheric environment on the laser scattering rate. The device can reflect the degree of light scattering measurement environment,and then assess whether the environment can meet the scattering measurement. The device takes a stable power laser as the light source,the light beam passes through the integrating sphere cavity,so the particles in the cavity are scattered,the scattered light is collected by the integrating sphere,and then the scattered light intensity of the integrating sphere is measured by the photoelectric multiplier tube. The signal processing is performed by the correlation detection method which can effectively remove the background noise. In the laboratory environment,the measurement accuracy is up to 0.1×10^-6,the device error can reach ± 2%,and the high precision measurement of scattering rate is achieved.

关 键 词：散射率 粒子 积分球 相关检测 

分 类 号：N32[自然科学总论]