温度自补偿高灵敏度非本征光纤珐珀横向负载传感器  

Transverse load sensor based on optical fiber extrinsic Fabry-Perot interferometer with high sensitivity and temperature self-compensation

作　　者：王彦[1] 刘加萍 刘吉虹 赵凯[1] 梁大开[2] 

机构地区：[1]安徽工业大学电气与信息工程学院,安徽马鞍山243000 [2]南京航空航天大学机械结构力学及控制国家重点实验室,江苏南京210016

出　　处：《光学精密工程》2017年第6期1433-1440,共8页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.51309001);安徽省教育厅自然科学基金重点项目(No.KJ2017A041)

摘　　要：为了提高光纤EFPI传感器的灵敏度,提出了一种新型EFPI传感结构,并对其温度特性以及横向负载特性进行了研究。首先,介绍了采用端面镀钯金膜的光纤EFPI传感器的结构及其制作方法;接着,建立了镀钯金膜光纤EFPI的温度传感模型,并通过Solidworks、Hypermesh与有限元分析软件ANSYS联合仿真,对它在不同受压力下进行理论模拟,获得了腔长变化与压力之间的关系;最后,对传统的光纤EFPI与镀钯金膜光纤EFPI的温度和横向负载特性进行了对比试验。试验结果表明,镀钯金膜光纤EFPI的温度灵敏度为6.083pm/℃,具有温度自补偿特性;它对横向负载的检测灵敏度可达40.83m/g,相对于传统的光纤EFPI横向负载的灵敏度提高了2.10倍。实验结果与理论分析相符合,为实际制作具有温度自补偿的高灵敏度光纤EFPI传感器提供了理论与实验依据。In order to improve the sensitivity of optical fiber EFPI sensors,a novel EFPI sensor structure was proposed,and its characteristics of temperature and transverse load were studied.Firstly,the structure and fabrication of the optical fiber EFPI sensor with its edge coated with palladium-gold were introduced.Then,the temperature sensing model of fiber optic EFPI coated with palladium-gold was established,and the relationship between change of cavity length and pressure was obtained in theoretical simulation of the sensor under different pressures by Solidworks,Hypermesh and finite element analysis software ANSYS.Finally,the comparison of temperature and transverse load characteristics between the traditional optical fiber EFPI and the palladium-gold coated optical fiber EFPIwas implemented.Experimental results show that the temperature sensitivity of the palladium-gold coated optical fiber EFPI is 6.083pm/℃ due to its characteristic of temperature self-compensation.Moreover,the detection sensitivity of transverse load can reach 40.83m/g,which has been improved by 2.10 times compared with the one of the traditional optical fiber EFPI.The experimental results coincide with the theoretical analysis,providing theoretical and experimental evidences for the production of optical fiber EFPI with high sensitivity and temperature self-compensation practically.

关 键 词：光纤传感器 光纤EFPI 镀钯金膜 横向负载 温度自补偿 

分 类 号：TN253[电子电信—物理电子学]