可调焦离轴三反光学系统的装调  

Alignment of focus-adjustable off-axis reflective optical system

作　　者：张学敏[1] 宋兴[1,2] 候晓华[1] 李华[1] 

机构地区：[1]中国科学院西安光学精密机械研究所,陕西西安710119 [2]中国科学院研究生院,北京100049

出　　处：《光学精密工程》2017年第6期1458-1463,共6页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.40805013)

摘　　要：针对离轴反射光学系统的精密装调问题,提出了一种高精度空间交互测量以及基准传递系统,可实现调焦角度与系统光轴的高精度角度定位。该系统口径为450mm,可实现0.5km至无穷远的调焦,调焦角度精确定位后,只需调整无穷远处离轴三反光学系统的波像差满足要求,即可保证系统各个调焦位置处的波像差均满足设计要求,大大提高了装调效率。装调实验结果表明,无穷远处系统的波像差结果为0.09λ,1.5km处系统的波像差为0.1λ,2.5km处系统的波像差为0.11λ,0.5km处系统的波像差为0.2λ,均优于设计要求。A space interactive measurement and datum transmission system with high accuracy was proposed,aiming at precise alignment problem of off-axis reflective optical system.Therefore the highly accurate angle location of focusing angle and systemic optical axis was realized.The diameter of the system was 450 mm,and focus-adjustable range was from 0.5km to infinity.After accurate positioning of focusing angles,only wave aberration of off-axis three-mirror optical system in infinite position needed to be adjusted to satisfy requirements,and the wave aberrations of all focus position in the system could be guaranteed to accord with design requirements,thus improving adjustment efficiency greatly.The experimental results show that the wave aberrations of the system in infinite position,1.5km,2.5km and 0.5km are 0.1λ,0.11λ,0.5km and 0.2λrespectively,which are all better than design requirements.

关 键 词：离轴光学系统 反射式光学系统 光学装调 可调焦 基准传递 

分 类 号：O435.2[机械工程—光学工程]